The invention relates to a method for enhancing the performance of an ECR (
Electron Cyclotron Resonance)
plasma source, and belongs to the application field of a low-temperature
plasma source. The principle of the invention lies in that the original source of space electrons is a small quantity of free electrons in a
resonance region of the existing ECR, electrons generated by gas
ionization are source of the electrons when
plasma discharge is formed, the
electron density is limited when equilibrium is achieved, and the improvement of
plasma parameters is restricted. On the basis of the existing ECR plasma source, a method of injecting electrons into the
resonance region space in a compulsive and active manner is adopted. On the basis of the existing
electron source, a lot of thermal electrons are generated by using a thermionic
cathode, and the thermal electrons enter the
resonance space under the control of an
electric field passing through the resonance region, so that the electrondensity of the resonance region is greatly improved. Since the
electron density of the resonance region is greatly improved, the ECR
ionization efficiency is further enhanced, and the performance indexes such as the
beam density of the ECR plasma source are improved.