The invention discloses a
nitride epitaxial layer preparation method and a
semiconductor epitaxial
wafer thereof. The method comprises the following steps: providing a substrate; a buffer layer is grown on the substrate, the buffer layer comprises a
nitride buffer layer and an
oxygen-containing buffer layer, and the
nitride buffer layer and the
oxygen-containing buffer layer are grown by alternately switching an MO source and an
oxygen-containing MO source in a periodic cycle mode to serve as precursor materials; and growing a nitride epitaxial layer on the buffer layer. The oxygen-containing buffer layer is grown through the oxygen-containing MO source process, on one hand, the in-situ growth oxygen-containing buffer layer has good
lattice mismatch relaxation, relieves lattice
adaptation and releases the stress of the substrate and the epitaxial layer, and a high-quality
gallium nitride epitaxial layer with low
dislocation density can be obtained; the
distribution uniformity and
nucleation density of oxygen-containing buffer
crystal grains are improved, and a high-quality nitride epitaxial layer is obtained; on the other hand, the technological process is simple,
pollution risks in the substrate and epitaxial layer transfer process are reduced,
repeatability is good, and large-scale production is facilitated.