The invention belongs to the technical field of super-large-scale
integrated circuit manufacturing, and in particular relates to an ultra-low
dielectric constant material film and a preparation method thereof. The preparation method comprises the following steps of: first, taking a single annular 2,4,6,8-tetravinyl-2, 4, 6, 8-tetravinylcyclotetrasiloxane as a precursor; then, forming a precursor film on a
silicon substrate by a spin-
coating method; next, irradiating the obtained film by using
ultraviolet light; later on, performing polyreaction among precursor monomers to form an ultra-low
dielectric constant SiOCH film; and finally, performing thermal annealing treatment on the film to further improve the electrical characteristics of the SiOCH film. In the SiOCH film obtained by adopting the method, the
dielectric constant can reach 1.94 and the breakdown
electric field intensity is greater than 3 MV / cm; and under the external
electric field of 1 MV / cm, the film has the
leakage current density magnitude order of 10<-7>A / cm2, the young's modulus of greater than 2 GPa, and the
hardness of 0.2 GPa.