The invention discloses a
system for calibrating the leak rates of vacuum leak holes of different leak indication gases. The
system comprises a
helium mass spectrum
leak detector, a standard container, an
argon source, a vacuum leak hole to be calibrated, a leak indication gas source, a constant volume chamber, a vortex molecular pump and a
turbine mechanical pump; the vortex molecular pump and the
turbine mechanical pump are connected with the constant volume chamber and the standard container by pipelines in sequence; one end of the vacuum leak hole to be calibrated is connected with the leak indication gas source by a pipeline, the other end is connected between the standard container and the constant volume chamber, and the
helium mass spectrum
leak detector and the
argon source are respectively connected to the connecting pipeline. Besides, the
system can obtain a conversion relation between leak rates when different leak indication gas media are quickly measured using the
helium mass spectrum
leak detector, via the magnitude of the
leak rate of the leak hole measured by a constant volume method and in combination with the leak rates, measured by the helium
mass spectrum leak
detector, of vacuum leak holes of different leak indication gas media. The system is reasonable in design, simple in structure and convenient to operate, and can be used for calibrating the leak rates of vacuum leak holes of different leak indication gases.