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System and method for calibrating leak rates of vacuum leak holes of different leak indication gases

A technology for vacuum leaks and gas leaks, which can solve environmental factors by using liquid/vacuum degree for liquid tightness measurement, detecting the appearance of fluid at the leak point, and measuring the rate of increase and deceleration of the fluid. Large size, long experiment period of constant volume method, and difficulty in quickly carrying out leak calibration, so as to achieve the effect of efficient calibration work, compact structure and low resistance

Active Publication Date: 2017-08-11
MATERIAL INST OF CHINA ACADEMY OF ENG PHYSICS
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Problems solved by technology

In addition, due to the shortcomings of the constant volume method, such as long experimental period and large environmental influence factors, it has brought difficulties to the rapid development of related work such as calibration of leak holes and quantitative measurement of different gas permeation rates.

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  • System and method for calibrating leak rates of vacuum leak holes of different leak indication gases
  • System and method for calibrating leak rates of vacuum leak holes of different leak indication gases
  • System and method for calibrating leak rates of vacuum leak holes of different leak indication gases

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Embodiment Construction

[0042] The present invention will be further described below with reference to the accompanying drawings and embodiments, and the mode of the present invention includes but not limited to the following embodiments.

[0043] The purpose of this embodiment is mainly to provide a method for calibrating the leak rate of vacuum leaks of different leaking gases. The leak rates of vacuum leaks in different leak-indicating gas media are obtained, and the conversion relationship between the leak rates when measuring different leak-indicating gas media with a helium mass spectrometer leak detector is obtained.

[0044] In order to realize the above method, a system for calibrating the leak rate of vacuum leaks of different leaking gases is specially designed.

[0045] Such as figure 1 As shown, the system includes an experimental device, connecting pipes between various devices in the experimental device, and valves arranged on the pipes.

[0046] The experimental device includes a he...

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Abstract

The invention discloses a system for calibrating the leak rates of vacuum leak holes of different leak indication gases. The system comprises a helium mass spectrum leak detector, a standard container, an argon source, a vacuum leak hole to be calibrated, a leak indication gas source, a constant volume chamber, a vortex molecular pump and a turbine mechanical pump; the vortex molecular pump and the turbine mechanical pump are connected with the constant volume chamber and the standard container by pipelines in sequence; one end of the vacuum leak hole to be calibrated is connected with the leak indication gas source by a pipeline, the other end is connected between the standard container and the constant volume chamber, and the helium mass spectrum leak detector and the argon source are respectively connected to the connecting pipeline. Besides, the system can obtain a conversion relation between leak rates when different leak indication gas media are quickly measured using the helium mass spectrum leak detector, via the magnitude of the leak rate of the leak hole measured by a constant volume method and in combination with the leak rates, measured by the helium mass spectrum leak detector, of vacuum leak holes of different leak indication gas media. The system is reasonable in design, simple in structure and convenient to operate, and can be used for calibrating the leak rates of vacuum leak holes of different leak indication gases.

Description

technical field [0001] The invention relates to a system and a method for calibrating the leak rate of a vacuum leak, in particular to a system and a method for calibrating the leak rate of a vacuum leak for different leak-indicating gases. Background technique [0002] At present, the methods commonly used in leak calibration include constant volume method, constant pressure method, mass spectrometry comparison method and so on. The constant volume method is calibrated by measuring the rate of change of pressure with time in a closed container with a constant volume, and the calibration range is usually 10 -1 ~10 -6 Pa∙m 3 / s, the constant pressure method is to measure the rate of change of the volume at a constant pressure to achieve calibration, and the calibration range is usually 10 -3 ~10 -8 Pa∙m 3 / s; the mass spectrometry comparison method uses a leak detector or a quadrupole mass spectrometer (QMS) as a comparator to achieve calibration by measuring the dynam...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/20G01M3/26
CPCG01M3/20G01M3/26
Inventor 叶小球王维陈长安李芳芳钟博阳饶咏初杨蕊竹李强吴吉良高涛
Owner MATERIAL INST OF CHINA ACADEMY OF ENG PHYSICS
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