This invention relates to oxahydrofluoroether compounds and a preparation method and application of the new oxahydrofluoroether compounds. The oxahydrofluoroether compounds are compounds represented by a general formula of CF3O(CF2O)mCF2CF2R, wherein R is OR1 or (OCF(CF3)CF2)nOR2 or OCF2CF2OR3, and R1, R2 and R3 are linear-chain or branched-chain C1-C3 alkyl groups. The designed new oxahydrofluoroether compounds have a structure with high content of the oxygen element, extremely low surface tension and stronger permeability than those of other hydrofluoroether solvents, and can be applied to cleaning agents so as to ensure thorough cleaning; meanwhile, due to high content of oxygen and a short atmospheric lifetime, the hydrofluoroether compounds can be easily degraded to CO2 and fluoride salts, and have a low GWP value which is the greenhouse effect potential value; the oxahydrofluoroether compounds have good application in anti-fingerprint liquid diluents, dilution of a fluorine-containing treating agent, removal of contaminants in equipment components, preparation of foamed plastics, welding in a vapor phase, transfer of heat, deposition of coatings on substrates and cutting or grinding aspects.