Composition for forming resist underlayer film and method for forming resist pattern using the same
A technology of resist underlayer and composition, which is applied in the field of composition and can solve problems such as no record
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Synthetic example 1
[0107] 9.00 g of monoallyl diglycidyl isocyanuric acid (manufactured by Shikoku Chemical Industry Co., Ltd.) represented by the above formula (9-a), 1,2,3 6.46 g of 4-cyclobutanetetracarboxylic dianhydride and 0.61 g of ethyl triphenylphosphonium bromide were dissolved in 64.29 g of propylene glycol monomethyl ether and reacted at 130°C for 4 hours to obtain a polymer-containing solution . The obtained polymkeric substance is equivalent to containing the polymkeric substance (a: b=1: 1 (molar ratio)) of structural unit shown in above-mentioned formula (13), carries out GPC analysis, the weight average molecular weight of calibration with standard polystyrene as a result is 7,400. 1,2,3,4-Cyclobutanetetracarboxylic dianhydride is obtained, for example, using the method described in JP-A-2-61956 and JP-A-2003-192685.
Synthetic example 2
[0109] 20.00 g of monoallyl diglycidyl isocyanuric acid (manufactured by Shikoku Chemical Industry Co., Ltd.), 7.06 g of 1,2,3,4-cyclobutanetetracarboxylic dianhydride, 2,4-dihydroxy 5.55 g of benzoic acid and 1.34 g of ethyltriphenylphosphonium bromide were dissolved in 79.19 g of propylene glycol monomethyl ether, and reacted at 130° C. for 4 hours to obtain a solution containing a polymer. The obtained polymkeric substance is equivalent to the polymkeric substance (a: b': b "'=2:1:1 (molar ratio)) that contains the structural unit shown in above-mentioned formula (14), carries out GPC analysis, the result is analyzed by standard polymer The styrene-calibrated weight average molecular weight was 8,200.
Synthetic example 3
[0111] Monoallyl diglycidyl isocyanuric acid (manufactured by Shikoku Chemical Industry Co., Ltd.) 8.00 g, 1,2,3,4-cyclopentanetetracarboxylic acid dicarboxylic acid represented by the above formula (7-d) After dissolving 6.04 g of anhydride (manufactured by Tokyo Chemical Industry Co., Ltd.) and 0.53 g of ethyltriphenylphosphonium bromide in 34.01 g of propylene glycol monomethyl ether, they were reacted at 130° C. for 4 hours to obtain a polymer-containing solution. The obtained polymkeric substance is equivalent to the polymkeric substance (a:b=1:1 (molar ratio)) that contains the structural unit shown in above-mentioned formula (15), carries out GPC analysis, the weight average molecular weight of result calibration with standard polystyrene for 10,000.
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