2015results about "Superconductor device manufacture/treatment" patented technology

One or more highly-oriented, multi-walled carbon nanotubes are grown on an outer surface of a substrate initially disposed with a catalyst film or catalyst nano-dot by plasma enhanced hot filament chemical vapor deposition of a carbon source gas and a catalyst gas at temperatures between 300° C. and 3000° C. The carbon nanotubes range from 4 to 500 nm in diameter and 0.1 to 50 μm in length depending on growth conditions. Carbon nanotube density can exceed 104 nanotubes / mm2. Acetylene is used as the carbon source gas, and ammonia is used as the catalyst gas. Plasma intensity, carbon source gas to catalyst gas ratio and their flow rates, catalyst film thickness, and temperature of chemical vapor deposition affect the lengths, diameters, density, and uniformity of the carbon nanotubes. The carbon nanotubes of the present invention are useful in electrochemical applications as well as in electron emission, structural composite, material storage, and microelectrode applications.

A thin film of material having a rock-salt-like structure is deposited on a smooth amorphous substrate surface by ion beam assisted deposition.

A method for producing a thin film includes disposing a precursor solution onto a substrate to form a precursor film. The precursor solution contains precursor components to a rare-earth / alkaline-earth-metal / transition-metal oxide including a salt of a rare earth element, a salt of an alkaline earth metal, and a salt of a transition metal in one or more solvents, wherein at least one of the salts is a fluoride-containing salt. The precursor solution also contains an additive component comprising one or more metal compounds capable of forming a second phase nanoparticle, either alone or in combination with one or more of the precursor components of the precursor solution or a dopant component comprising one or more metal compounds capable of substituting for an element of the rare-earth / alkaline-earth-metal / transition-metal oxide, and treating the precursor film to form an intermediate metal oxyfluoride including the rare earth, the alkaline earth metal, the transition metal and the additive metal or dopant metal of the precursor solution.

Different types of energy storage systems are described, in particular hydro-pneumatic storage systems. In one, energy is stored by compressing gas in a chamber (44,45,54,55) with a liquid piston and released by gas expansion. A spray head or grid at the top of the chamber (44,45,54,55) supplies liquid as a shower through the gas being compressed or expanding in the cylinder (11,12) to maintain an isothermal condition. In another, energy is stored from an array of solar cells connected to an array of supercapacitors forming an auxiliary storage, and a main energy storage device such as a hydro-pneumatic storage system, for supply to an AC or DC network. The efficiency is improved by connecting the solar cells via the array of supercapacitors to the AC or DC network. An immersed hydro-pneumatic storage device for off-shore / on-shore power generation systems comprises a cylinder that is immersed in a liquid mass, wherein energy is stored by compressing gas with a liquid piston and energy is released by gas expansion. The mass of liquid maintains an isothermal condition in the cylinder during compression and expansion.

A memory IC includes a first substrate (substrate on the transfer destination side), and memory cell arrays deposited on the first substrate. The memory cell arrays are deposited from the bottom up by a method for transferring a thin film configuration. The transferring method includes the steps of forming a thin film device layer (memory cell array) on a second substrate with a separable layer therebetween, and irradiating the separable layer with light to cause a separation in the separable layer and / or at an interface so that the thin film device layer on the second substrate is transferred to the first substrate.

Low-loss superconducting devices and methods for fabricating low loss superconducting devices. For example, superconducting devices, such as superconducting resonator devices, are formed with a (200)-oriented texture titanium nitride (TiN) layer to provide high Q, low loss resonator structures particularly suitable for application to radio-frequency (RF) and / or microwave superconducting resonators, such as coplanar waveguide superconducting resonators. In one aspect, a method of forming a superconducting device includes foaming a silicon nitride (SiN) seed layer on a substrate, and forming a (200)-oriented texture titanium nitride (TiN) layer on the SiN seed layer.

The invention provides a method for forming a film pattern, in which a method for forming a film pattern by the ink-jet method is improved, an increase in film thickness is achieved efficiently with simple steps, a requirement for a decrease in line width is met and, in addition, problems such as breaks and short circuits are not brought about when a conductive film is made. The method can include a first discharging step, wherein droplets are discharged in the whole film formation region with a pitch larger than the diameter of the droplet after being hit onto the substrate. In the second discharging step, droplets are discharged at positions in the whole film formation region different from the discharge positions in the first discharging step with the same pitch as that in the first discharging step. In the third discharging step, droplets are discharged in the whole film formation region with a pitch smaller than the pitch in the first discharging step. The substrate is treated beforehand in order to have the contact angle of 60 degrees or more with respect to the droplets.

Various techniques and apparatus permit fabrication of superconductive circuits. A niobium / aluminum oxide / niobium trilayer may be formed and individual Josephson Junctions (JJs) formed. A protective cap may protect a JJ during fabrication. A hybrid dielectric may be formed. A superconductive integrated circuit may be formed using a subtractive patterning and / or additive patterning. A superconducting metal layer may be deposited by electroplating and / or polished by chemical-mechanical planarization. The thickness of an inner layer dielectric may be controlled by a deposition process. A substrate may include a base of silicon and top layer including aluminum oxide. Depositing of superconducting metal layer may be stopped or paused to allow cooling before completion. Multiple layers may be aligned by patterning an alignment marker in a superconducting metal layer.

The invention relates to multi-layer articles and methods of making such articles. The methods include first conditioning the surface of an underlying layer, such as a buffer layer or a superconductor layer, then disposing a layer of material on the conditioned surface. The conditioned surface can be a high quality surface. Superconductor articles formed by these methods can exhibit relatively high critical current densities.

The present invention relates to an apparatus and method for forming a high-temperature superconducting film on a long tape substrate at speeds suitable for large-scale production. The method includes a spooling system for use in a high-throughput, continuous pulsed laser deposition (PLD) process in which a superconducting layer, such as yttrium-barium-copper-oxide (YBCO), is deposited atop a buffered metal substrate tape that is translated through one or more deposition chambers via the action of a reel-to-reel spooling system and a conductive-radiant multi-zone substrate heater. It also optionally includes a multi-target manipulator apparatus and multiple laser beams in which multiple targets are impinged upon simultaneously.

A method of preparing a biaxially textured alloy article comprises the steps of preparing a mixture comprising Ni powder and at least one powder selected from the group consisting of Cr, W, V, Mo, Cu, Al, Ce, YSZ, Y, Rare Earths, (RE), MgO, CeO2, and Y2O3; compacting the mixture, followed by heat treating and rapidly recrystallizing to produce a biaxial texture on the article. In some embodiments the alloy article further comprises electromagnetic or electro-optical devices and possesses superconducting properties.

A composite substrate structure including a substrate, a layer of a crystalline metal oxide or crystalline metal oxynitride material upon the substrate, a layer of an oriented cubic oxide material having a rock-salt-like structure upon the crystalline metal oxide or crystalline metal oxynitride material layer is provided together with additional layers such as one or more layers of a buffer material upon the oriented cubic oxide material layer.Jc′s of 2.3×106 A / cm2 have been demonstrated with projected Ic′s of 320 Amperes across a sample 1 cm wide for a superconducting article including a flexible polycrystalline metallic substrate, an inert oxide material layer upon the surface of the flexible polycrystalline metallic substrate, a layer of a crystalline metal oxide or crystalline metal oxynitride material upon the layer of the inert oxide material, a layer of an oriented cubic oxide material having a rock-salt-like structure upon the crystalline metal oxide or crystalline metal oxynitride material layer, a layer of a buffer material upon the oriented cubic oxide material layer, and, a top-layer of a high temperature superconducting material upon the layer of a buffer material.

Novel articles and methods to fabricate same with self-assembled nanodots and / or nanorods of a single or multicomponent material within another single or multicomponent material for use in electrical, electronic, magnetic, electromagnetic, superconducting and electrooptical devices is disclosed. Self-assembled nanodots and / or nanorods are ordered arrays wherein ordering occurs due to strain minimization during growth of the materials. A simple method to accomplish this when depositing in-situ films is also disclosed. Device applications of resulting materials are in areas of superconductivity, photovoltaics, ferroelectrics, magnetoresistance, high density storage, solid state lighting, non-volatile memory, photoluminescence, thermoelectrics and in quantum dot lasers.

The present invention relates to epitaxial, electrically conducting and mechanically robust, cubic nitride buffer layers deposited epitaxially on biaxially textured substrates such as metals and alloys. The invention comprises of a biaxially textured substrate with epitaxial layers of nitrides. The invention also discloses a method to form such epitaxial layers using a high rate deposition method as well as without the use of forming gases. The invention further comprises epitaxial layers of oxides on the biaxially textured nitride layers. In some embodiments the article further comprises electromagnetic devices which may be super conducting properties.

An article having low ac loss includes an elongated substrate having a length and a width; and a plurality of filaments comprising an oxide superconductor extending substantially along the length of the elongated substrate and spaced apart from one other filaments across the width of the elongated substrate, wherein at least one filament crosses over at least one other filament such that the at least one filament occupies a first position across the width of the elongated substrate before the crossover and a second position across the width of the elongated substrate after crossover.

Superconducting integrated circuits require several wiring layers to distribute bias and signals across the circuit, which must cross each other both with and without contacts. All wiring lines and contacts must be fully superconducting, and in the prior art each wiring layer comprises a single metallic thin film. An alternative wiring layer is disclosed that comprises sequential layers of two or more different metals. Such a multi-metallic wiring layer may offer improved resistance to impurity diffusion, better surface passivation, and / or reduction of stress, beyond that which is attainable with a single-metallic wiring layer. The resulting process leads to improved margin and yield in an integrated circuit comprising a plurality of Josephson junctions. Several preferred embodiments are disclosed, for both planarized and non-planarized processes. These preferred and other methods may be applied to digital circuits based on Rapid Single Flux Quantum logic, and to quantum computing using Josephson junction qubits.

Superconductive interconnection structures providing continuous, uninterrupted superconducting signal paths between a superconducting chip and a superconducting chip carrier are described. The superconductive interconnection structures employ superconducting solder bumps and pillars of Under Bump Metal (“UBM”). The superconductive interconnection structures are employed in a two-stage solder bumping process in which the superconducting chip is first bonded to a testing module for screening and then bonded to a chip packaging module for operation. Either the testing module or the chip packaging module, or both, may include a multi-chip module for carrying multiple superconducting chips simultaneously.

An improved persistent current switch design and method of operation are disclosed. By way of example, a persistent current switch circuit comprises a heating element and a switch element located proximate to the heating element, the switch element being substantially formed from a material (by way of example only, titanium) which exhibits a superconducting temperature value below a superconducting temperature value exhibited by a material (by way of example only, aluminum) used to provide a connection to the switch element. The switch element is responsive to the heating element such that the heating element is used to control whether or not the switch element is in a superconducting state. The switch element may also have a folded geometry. Such persistent current switches exhibit low power and low inductance.

A method of compensating for thermal contraction of superconducting and cryo-resistive cables. The method includes the steps of determining a compensation length for a cable such that when the cable is subjected to an operating temperature, the cable is in or near a stress-free state, and installing the cable into a pipe such that portions of the cable extend outwardly past ends of the pipe. The method further includes the steps of marking each end of the cable such that the determined compensation length is visibly shown, forcing the cable into the pipe at an ambient installation temperature such that a cable pattern is formed therein, and maintaining the cable in the pipe to prevent the cable from being pushed out of the pipe.

A device and method for making a persistent joint allowing end terminations of superconducting MgB2 wire to be joined with a superconducting bridge. Superconducting electromagnetic coils may be joined in series or joining of coil assemblies to current sources and the two ends of a persistent switch. The device includes wire filaments with end preparation exposing reacted MgB2, inserted into a block and surrounded with Mg+B and / or MgB2 in powder, solid, slurry or sol-gel form and subsequently reacted to establish a bridge of superconducting MgB2 electrically connecting the superconducting MgB2 wires. Autonomous operation of the superconducting background magnet coils in magnetic resonance imaging (MRI) and nuclear magnetic resonance (NMR) devices are allowed, or similar devices where autonomous operation of an MgB2 based superconducting magnet is required. The low resistant joint will also be beneficial for other superconducting applications such as fault current limiters, motors, generators, etc.

Supported perovskite-type oxides are described. The perovskite-type oxides have the general formula of AxA'x'ByB'y'O3-delta, wherein A is an ion of a metal of Group IIIa or IIIb of the periodic table of elements or mixtures thereof; A' is an ion of a metal of Groups Ia or IIa of the periodic table or mixtures thereof; B and B' are ions of a d-block transition metal of the periodic table or mixtures thereof; x, x', y and y' vary from 0 to 1; 0.95<x+x'<1.05; 0.95<y+y'<1.05; delta is the deviation from ideal oxygen stoichiometry. This invention also provides for the selection of support materials and the shapes of supported perovskite-type oxides as well as the methods for making them.

Fabrication of yarns or other shaped articles from materials in powder form (or nanoparticles or nanofibers) using carbon nanotube / nanofiber sheet as a platform (template). This includes methods for fabricating biscrolled yarns using carbon nanotube / nanofiber sheets and biscrolled fibers fabricated thereby.

The method for forming superconducting films of complex oxide compounds in a process chamber according to the present invention includes the steps of: (a) placing a substrate near a target in a chamber so that the substrate is positioned to be generally perpendicular to a surface of the target, the target comprising a target material of complex oxide compounds; and (b) irradiating a laser beam to the surface of the target to vaporize or sublime the target material forming over the target a flame-shaped plume having on axis generally perpendicular to the surface of the target so that the target material is deposited onto a surface of the substrate, the surface of the substrate maintaining the position to be generally perpendicular to the surface of the target and being generally parallel to the axis of the plume, wherein the target rotates on an axis perpendicular to the surface of the target and the substrate rotates on an axis perpendicular to the surface of the substrate (off-axis geometry), and wherein the laser beam scans the surface of the target. The chamber pressure Pc for the off-axis geometry laser ablation should be 0.8 Torr< / =PC< / =1.5 Torr for Y1Ba2Cu3O7-x film.

A method of preparing a biaxially textured article comprises the steps of providing a metal preform, coating or laminating the preform with a metal layer, deforming the layer to a sufficient degree, and rapidly recrystallizing the layer to produce a biaxial texture. A superconducting epitaxial layer may then be deposited on the biaxial texture. In some embodiments the article further comprises buffer layers, electromagnetic devices or electro-optical devices.

A superconducting integrated circuit, comprising a plurality of superconducting circuit elements, each having a variation in operating voltage over time; a common power line; and a plurality of bias circuits, each connected to the common power line, and to a respective superconducting circuit element, wherein each respective bias circuit is superconducting during at least one time portion of the operation of a respective superconducting circuit element, and is configured to supply the variation in operating voltage over time to the respective superconducting circuit element.

A biaxially textured alloy article comprises Ni powder and at least one powder selected from the group consisting of Cr, W, V, Mo, Cu, Al, Ce, YSZ, Y, Rare Earths, (RE), MgO, CeO2, and Y2O3; compacted and heat treated, then rapidly recrystallized to produce a biaxial texture on the article. In some embodiments the alloy article further comprises electromagnetic or electro-optical devices and possesses superconducting properties.

A superconducting magnet assembly and method of cooling a superconducting magnet assembly. An embodiment of the method of manufacturing a superconducting magnet assembly includes: providing a housing configured about a vacuum reservoir; forming a coil former; surrounding the coil former with a thermal shield; locating the thermal shield in the vacuum reservoir; positioning a superconducting magnet about the coil former, wherein the superconducting magnet is configured about a central core to receive an object; providing a second vacuum reservoir having a cryogen reservoir therein; providing two two-phase heat transfer devices wherein each comprises tubing having an evaporator region and a condenser region; thermally connecting the evaporator region of one of the heat transfer devices with the coil former and / or the superconducting magnet and the evaporator region of the other two-phase heat transfer device with the thermal shield; and thermally connecting a cryocooler to the cryogen reservoir and to the condensing region of both heat transfer devices.

A method for producing a thick film includes disposing a precursor solution onto a substrate to form a precursor film. The precursor solution contains precursor components to a rare-earth / alkaline-earth-metal / transition-metal oxide including a salt of a rare earth element, a salt of an alkaline earth metal, and a salt of a transition metal in one or more solvents, wherein at least one of the salts is a fluoride-containing salt, and wherein the ratio of the transition metal to the alkaline earth metal is greater than 1.5. The precursor solution is treated to form a rare earth-alkaline earth-metal transition metal oxide superconductor film having a thickness greater than 0.8 μm. precursor solution.