The invention discloses a cooling
silane intermediate storage tank with an outer coiled
pipe, comprising an upper sealing head, a
barrel body, a coiled
pipe, a lower sealing head, a feeding
pipe, a discharging pipe, a temperature measuring pipe, a
coolant and heating medium feeding port, a
coolant and heating medium outlet and a support, wherein the upper sealing head and the lower sealing head are connected with the upper end and the lower end of the
barrel body to form a shell of the
silane intermediate storage tank; the shell is arranged on the support; the coiled pipe is fixedly arranged on an outer wall of the shell; the lower hole of the coiled pipe is the
coolant and heating medium feeding port; the upper hole of the coiled pipe is the coolant and heating medium outlet; therefore, a coolant and heating medium channel for cooling and gasifying
silane is formed; and the feeding pipe and the discharging pipe for silane, and the temperature measuring pipe for measuring temperature are connected with the upper sealing head. The device disclosed by the invention adopts low-temperature low-pressure storage, has high safety and solves the
material storage and gasification packaging problems during silane production well.