Cooling silane intermediate storage tank with outer coiled pipe

Abstract

The invention discloses a cooling silane intermediate storage tank with an outer coiled pipe, comprising an upper sealing head, a barrel body, a coiled pipe, a lower sealing head, a feeding pipe, a discharging pipe, a temperature measuring pipe, a coolant and heating medium feeding port, a coolant and heating medium outlet and a support, wherein the upper sealing head and the lower sealing head are connected with the upper end and the lower end of the barrel body to form a shell of the silane intermediate storage tank; the shell is arranged on the support; the coiled pipe is fixedly arranged on an outer wall of the shell; the lower hole of the coiled pipe is the coolant and heating medium feeding port; the upper hole of the coiled pipe is the coolant and heating medium outlet; therefore, a coolant and heating medium channel for cooling and gasifying silane is formed; and the feeding pipe and the discharging pipe for silane, and the temperature measuring pipe for measuring temperature are connected with the upper sealing head. The device disclosed by the invention adopts low-temperature low-pressure storage, has high safety and solves the material storage and gasification packaging problems during silane production well.

Description

technical field [0001] The invention relates to the fields of electronics and photovoltaics, in particular to a storage device in the production process of silane. Background technique [0002] Silane: Molecular weight: 32.118 Melting point: (101.325KPa) -185°C Boiling point: -111.5°C It is a colorless gas with a foul smell at normal temperature and pressure. It is ignited at room temperature and explosively burns in air or halogen gas. It is very unsafe to store at normal temperature and pressure. The conventional practice is that in the production process of silane, the intermediate storage of silane is stored at low temperature and high pressure. The storage tank has always been a Dewar bottle, which is composed of a double-layer steel cylinder with two walls After mirror polishing, the air between the two walls is sucked out to form a vacuum. After mirror polishing, it can prevent radiation heat dissipation, and vacuum can prevent convection and conduction heat dissipat...

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Problems solved by technology

[0003] However, the production cost of the Dewar bottle is high. The bottle body is composed of a double-layer steel cylinder, and a vacuum is drawn between the two layers of shells, and the shell has to be mirror-polished. If silane is to be packaged, another device is required. Gasification and then packaging, the entire process line is long, the number of equipment is large, there are many valves, many pipes, many joints, the probability of failure is high, the safety is poor, and the canning is inconvenient

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