A method to make magnetic
random access memory (MRAM), in particular, perpendicular
spin transfer torque MRAM or p-STT-MRAIVI is provided. Electrically isolated
memory cell is formed by
ion implantation instead of
etching and
dielectric refill.
Oxygen ion implantation is used to convert the
photolithography exposed areas into
metal oxide dielectric matrix. An ultrathin single-layer or multiple-layer of
oxygen-
getter, selected from Mg, Zr, Y, Th, Ti, Al, Ba is inserted into the active
magnetic memory layer in addition to putting a thicker such material above and below the memory layer to effectively capture the impinged
oxygen ions.
Oxygen is further confined within the core device layer by adding
oxygen stopping layer below the bottom oxygen-
getter. After a high temperature anneal, a uniformly distributed and electrically insulated
metal oxide dielectric is formed across the middle device layer outside the
photolithography protected device area, thus forming MRAM
cell without any physical deformation and damage at the device boundary.