A capacitor and a method of manufacturing the same
A technology of capacitors and dielectrics, applied in the field of capacitors, can solve problems such as trouble
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[0045] The illustrations in the figures are schematic. In different figures, similar or identical elements have the same reference signs.
[0046] figure 1 An integrated circuit 100 according to an example embodiment of the invention is shown.
[0047] The integrated circuit 100 is formed in a silicon process, ie, on a crystalline silicon substrate 102 . The integrated circuit 100 includes an integrated circuit portion 104 in which multiple integrated circuit components such as inductors, resistors, transistors, etc. may be monolithically integrated. Integrated circuit 100 also includes monolithically integrated capacitor 110 electrically coupled to integrated circuit component 104 via conductive trace 106 . Accordingly, capacitor 110 may interact with monolithic integrated circuit assembly 104 , eg, to form a resonant circuit, an oscillator circuit, a filter, a memory unit, or the like.
[0048]Capacitor 110 includes a thin film capacitor dielectric layer 112 formed from ...
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