The invention discloses a high precision
vibrating wire type micro-
pressure sensor comprising a housing, a cable joint connected with a cable, an
induction coil, a micro-
pressure sensitive part, an inner plugging cover provided with a central hole, and a permeable part. One end of the housing is connected with the cable joint, and the other end of the housing is connected with the permeable part. The
induction coil, the micro-
pressure sensitive part, and the inner plugging cover are disposed in the housing, and are sequentially connected together. The micro-
pressure sensitive part comprises an upper end, a main body, a corrugated
pipe, a lower end, a vacuum diaphragm
capsule, and a steel wire. The upper end, the main body, the corrugated
pipe, and the lower end are sequentially connected together, and are used to form a sealed cavity body. The steel wire is disposed in the sealed cavity body, and the vacuum diaphragm
capsule is connected with the lower end. The micro-pressure sensitive part is disposed in the housing in a packaged manner, and the micro-pressure sensitive part is prevented from damaging caused by external influences. The stability of the sensor is improved, and a problem of inability of realizing extreme micro-pressure and high precision is solved. By combining the flexible stainless steel corrupted
pipe with the vacuum diaphragm
capsule, precision of measured values is improved.