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Optical cavity ring-down adaptive optical active transverse mode matching method

A technology of adaptive optics and optical cavity ring-down, which is applied in the field of optical cavity ring-down, can solve the problems of decreased measurement accuracy and measurement stability, and achieve the effects of improving the matching accuracy of transverse modes, reducing errors, and increasing the measurement aperture

Pending Publication Date: 2021-08-27
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

[0004] The technical problem to be solved by the present invention is: in the optical cavity ring down technology, the mismatch of the transverse mode will cause the decrease of measurement accuracy and measurement stability

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  • Optical cavity ring-down adaptive optical active transverse mode matching method
  • Optical cavity ring-down adaptive optical active transverse mode matching method
  • Optical cavity ring-down adaptive optical active transverse mode matching method

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Embodiment Construction

[0018] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0019] like figure 1 As shown, an optical cavity ring-down adaptive optical active transverse mode matching method of the present invention, the specific implementation steps are as follows:

[0020] Step (1), establishing an optical cavity ring-down measurement device, which consists of four parts: a laser light source module, an active transverse mode matching module, a ring-down cavity module, and a signal acquisition and processing module. Among them, the signal acquisition and processing module includes a high-speed photodetector and a far-field sensor, which respectively record the ring-down signal of the optical cavity and the shape of the transmitted spot of the ring-down cavity; the laser light source module includes a laser light source and an indicator light source, which are respectively controlled by The beam splitter M4 and the m...

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Abstract

The invention relates to an optical cavity ring-down adaptive optical active transverse mode matching method. An operation mode in a ring-down cavity is actively intervened by using an adaptive optical beam control technology, the mode coupling efficiency of a fundamental transverse mode in the ring-down cavity is effectively ensured, and active transverse mode matching is realized. The active transverse mode matching mode can effectively ensure the measurement precision and stability of the cavity ring-down technology. Meanwhile, in the application of film system parameter measurement, the method allows the use of an expanded beam to obtain the average result of a film system to be measured in the large aperture at one time; and compared with a traditional point measurement mode, the method can increase the measurement aperture, reduce the error caused by the randomness of a point measurement selection position, and obtain a measurement result closer to the actual working state of the film system.

Description

technical field [0001] The invention relates to the technical field of optical cavity ring down, in particular to an optical cavity ring down adaptive optical active transverse mode matching method, which contributes to the measurement accuracy and measurement stability of the optical cavity ring down technology. Background technique [0002] Optical cavity ring down technology is a detection technology based on high-precision resonant cavity, which has been successfully applied in the fields of trace gas detection, absorption spectrum measurement and high reflectance measurement. (D.Romanini, A.A.Kachanov, J.Morville, M.Chenevier, "Measurement of trace gases by diode laser cavity ringdownspectroscopy", Proc of SPIE, 1999, 3821: 94~104; Li Bincheng, Gong Yuan; Optical cavity downspectroscopy A review of high reflectivity measurement technology, "Laser and Optoelectronics Progress", 2010, 47: 021203) [0003] For cavity ring down technology, mode mismatch is the main source ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/03G01N21/31G01N21/47
CPCG01N21/0303G01N21/31G01N21/4738
Inventor 何星王帅林海奇杨平
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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