The invention relates to the field of failure analysis and provides a failure analysis method. The failure analysis method comprises the following steps of: A, receiving good product samples and defective product samples; B, concluding and summarizing the failure background and failure phenomena of the defective product samples; C, performing preliminary nondestructive analysis and failure location summary on the defective product samples, and determining the comparison characteristics; D, designing an analysis scheme; E, analyzing according to the designed analysis scheme, and determining whether comparison characteristics exist or not respectively; and F, determining the characteristics of physical evidence according to the exitance conditon of the comparison characteristics in the good product samples and the defective product samples, and determining the specific failure reasons of the defective product samples. According to the method provided by the invention, the 'principle of identification', 'principle of relativity', 'principle of materiality' and 'principle of information transfer' in the field of law are applied to the failure analysis, and the whole failure analysis processes are integrated according to the principle of law, so that mutual verification can be realized among the scattered evidences to obtain a conclusion with greater accuracy and persuasion.