Damage-free and non-contact analysis system
A non-contact analysis, a series of technologies, applied in the direction of non-contact circuit testing, material analysis, material analysis through electromagnetic means, etc., can solve problems such as difficult to distinguish
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[0067] refer to Figures 1 to 3 , an embodiment of the non-destructive non-contact analysis system according to the present invention will be described below.
[0068] The non-destructive non-contact analysis system is used to analyze and evaluate an object to be analyzed and evaluated, such as a silicon wafer, in which an electric current can be excited when irradiated with a laser beam. Note that this current is known in the art as OBIC (Beam Incentive Current), as already explained.
[0069] The non-destructive non-contact analysis system comprises a system control unit 10, which is structured as figure 2 microcomputer shown. That is, the system control unit 10 includes a central processing unit (CPU) 10A, a read only memory (ROM) 10B for storing various programs and constants, a random access memory (RAM) 10C for storing temporary data, input an output (I / O) interface circuit 10D, and two analog-to-digital (A / D) converters 10E and 10F.
[0070] Also, the non-destructi...
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