The invention discloses a micro-
resonant cavity LED
chip with a substrate removed through chemical
erosion and a preparation method thereof. The LED
chip is an inversely installed
film structure, and an epitaxial film only contains a p-GaN layer, a
quantum well layer and an n-GaN layer. The lower surface of the p-GaN layer is a metallic reflection
electrode with
high reflectivity, a medium distributed Bragg reflection mirror is arranged on the upper surface of the n-GaN layer, a metallic reflection
electrode and a medium DBR form a reflector of a
resonant cavity, and the chamber length of the
resonant cavity is
order of magnitude of the
wavelength. According to the preparation method, the substrate of an LED epitaxial
wafer is removed through first photoelectric auxiliary chemical
erosion and second chemical
erosion, and then the LED epitaxial
wafer is distributed on a heat conduction substrate through
metallic bonding to obtain the micro-resonant cavity LED
chip with substrate removed through chemical erosion. No extra material is introduced in the preparation method,
pollution of the vacuum cavity of epitaxial growth equipment can be prevented, and the length of the resonant cavity can be reduced.