The invention relates to a micro-bridge structure
infrared detector, a
CMOS measurement circuit
system and a
CMOS infrared sensing structure in the micro-bridge structure
infrared detector are both prepared by using a
CMOS process, the CMOS manufacturing process comprises a
metal interconnection process, a through hole process, an IMD process and an RDL process, and a columnar structure in the micro-bridge structure
infrared detector is a hollow columnar structure. The columnar structure at least comprises an
electrode layer, and each of the absorption plate and the beam structure at least comprises a first
dielectric layer, an
electrode layer and a second
dielectric layer; and the
infrared detector with the micro-bridge structure further comprises a
metamaterial structure and / or a polarization structure. According to the technical scheme, the problems that a traditional MEMS technology
infrared detector is low in performance, low in pixel scale, low in yield, poor in consistency and the like are solved, the
absorption rate of the infrared
detector of the micro-bridge structure to incident infrared electromagnetic
waves is improved, the performance of the infrared detector of the micro-bridge structure is optimized, and the difficulty of optical design of the infrared detector with the micro-bridge structure is reduced.