30results about How to "Good vacuum tightness" patented technology

A dome-type microwave plasma chemical vapor deposition diamond film device , suitable for rapid preparation of high-quality diamond films under high-power microwave input. The main body of the resonant cavity is composed of a dome reflector, a metal sheet reflector, a quartz ring window, a cylindrical reflector and a deposition platform. The reflector of the thin metal plate can block the propagation of the microwave to the top of the resonant cavity, so that the microwave can be more concentrated on the substrate. The deposition platform is divided into two parts, the central deposition platform and the edge deposition platform. The independent up and down movement functions of the two parts are conducive to the rapid optimization of the plasma state. The quartz ring window is hidden between the slits formed by the walls of the resonant cavity, which can avoid plasma etching and improve the vacuum performance of the resonant cavity. In addition, good water cooling system design ensures the safety of equipment running under high power. The combination of many advantages makes the dome-type microwave plasma chemical vapor deposition device capable of depositing high-quality diamond films at high speeds at high power levels.

The invention discloses a terahertz traveling wave tube ultra-wideband quasi-light output system and a manufacturing method thereof. A Gaussian horn is used to convert a waveguide mode into a Gaussianmode, to realize long-distance low-loss transmission and high-efficiency coupling of free space. A Brewster output window is used to overcomes a characteristic of a traditional box-type output windowof low bandwidth, and vacuum sealing is realized, and broadband output is ensured. A traditional system device processing mode is abandoned, and the system integrally processes molding, thereby greatly reducing transmission loss caused by flange connection gap and structural irregularity caused by welding. a processing loading table is used in the system, and a groove of a window piece is processed on the loading table. In welding, force of the window piece is uniform, and possibility of cracking of the window piece caused by force is greatly reduced, and transmission loss caused by deformation of the window piece due to force is reduced. The system can realize ultra-wideband output of electromagnetic waves in a terahertz band and has good vacuum sealing performance.

The invention discloses a capacitive pressure sensor, which is suitable for the sensor field. It includes a substrate and a cover plate. The substrate includes a top layer, a bottom layer and an insulating layer. So that the groove forms a vacuum cavity, and the bottom of the groove forms a pressure-sensitive film, and the top layer is provided with a movable interdigital capacitor and a fixed interdigital capacitor, which are arranged staggered and equidistant from each other, and the movable interdigital capacitor passes through. The insulating layer directly under it is attached to the pressure-sensitive film, and the insulating layer directly under the fixed interdigital capacitor is suspended between the bottom layer and the fixed interdigital capacitor. The embodiment of the present invention also discloses a preparation method and a pressure measurement device of a capacitive pressure sensor. When the pressure-sensitive film is deformed by force, the facing area between the movable interdigital capacitor and the fixed interdigital capacitor can be adjusted. It has good linear output, and at the same time, the vacuum tightness is good, which can avoid the extraction of electrodes in the vacuum cavity.

The invention discloses an ultra-wideband terahertz Brewster vacuum window and a production method thereof. The ultra-wideband terahertz Brewster vacuum window adopts a window plate supporting frame, wherein the window plate supporting frame comprises an elliptical bottom surface and a circular groove; through the elliptical bottom surface, an elliptical section of a cylindrical waveguide is welded, and through the circular groove, a circular window plate is welded, so that electromagnetic wave is propagated from the cylindrical waveguide to the circular window plate; during welding of the circular window plate, stress distribution is relatively uniform, and when the circular window plate is welded with the window plate supporting frame, the influence of stress can be reduced to avoid cracking; a rectangular through hole is formed in the window plate supporting frame, and the influence of the stress can be reduced when a passing condition of the wave is met, so that welding success rate is greatly increased; the structures are connected in a welding manner so as to meet a sealing vacuum requirement; the thickness of the circular window plate meets a requirement that reflected wave and the re-refracted wave are counteracted with each other, so that the transmission efficiency is improved; the ultra-wideband terahertz Brewster vacuum window can achieve ultra-wideband transmission of the electromagnetic wave within a terahertz wave band, has good vacuum sealing performance, and has the advantages of easy production and low price.

The invention discloses a helium mass spectrometer leak detection device for pipe materials, which comprises a vacuum joint (1), a mandrel (2), a lower pressure piece (3), a sealing gasket (5), a support piece (6) and a helium mass spectrometer detector. The mandrel (2) is a hollow tubular structure, and a vacuum joint (1) is provided on the top of the mandrel (2), and the pressing member (3), the gasket (5) and the supporting member (6) are set Set on the mandrel (2), the support (6) is detachably fixed on the mandrel (2), and the pressing member (3) can move axially along the mandrel (2), so that the gasket ( 5) It can radially expand along the mandrel (2) under the extrusion action of the pressing member (3) and the supporting member (6). The pipe material helium mass spectrometer leak detection device of the present invention has many advantages such as easy manufacture, simple operation, high reliability, high leak detection efficiency, low cost, and reusability.

The invention discloses a lead-free solder for quartz glass sealing. The matrix of the lead-free solder is tin, and the atomic percentage components of Ti and O introduced are Ti: 0.2% to 6%, O: 0.05% to 5.9%, wherein the atomic ratio of Ti and O is greater than 1, and the lead-free solder The mass percentage of impurities in is less than or equal to 0.1%. The soldering temperature range of the lead-free solder is 600℃~800℃, and the welding vacuum degree is less than or equal to 5×10 ‑3 Pa. The lead-free solder for quartz glass sealing of the present invention does not need flux during the sealing process of quartz glass, simplifies the sealing process of quartz glass, and improves the vacuum sealing reliability of quartz glass sealing. The lead-free solder can be widely used in quartz glass sealing, and can also be used in quartz glass, the softening temperature of which is not lower than 800 ℃ 2 Mutual welding of glass, titanium, and metal with titanium coating on the surface as the main component. It is especially suitable for preparing pulsed xenon lamps, which can significantly improve the service life and working reliability of the pulsed xenon lamps.

The invention relates to a vacuum sealing joint for a low-temperature tubular heating tube. The vacuum sealing joint comprises a tubular spiral heating tube, a vacuum joint, a sealing ring and compression nuts, wherein the vacuum joint is fixedly connected into an installation hole of a vacuum furnace wall; conducting ends of the tubular spiral heating tube are inserted in the vacuum joint; the vacuum joint is provided with inner conical holes, and in fit connection with outer conical tables on the tubular spiral heating tube through the inner conical holes; the sealing ring is arranged between the inner conical holes and the outer conical tables; and the tubular spiral heating tube is locked and fixed, and the sealing ring is compressed on the conducting ends of the tubular spiral heating tube through the compression nuts, so as to achieve a vacuum sealing effect. The joint enables a heating component of a vacuum furnace to be directly supplied with power of 220 V instead of being supplied with power by configuring voltage dropping equipment, thus configuration of a small vacuum furnace is simplified, and the equipment cost is reduced. Moreover, a reliable sealing structure is provided for producing the small vacuum heating furnace by virtue of the heating component for vacuum heating, and a technical support is provided for producing the small vacuum heating furnace by widely using the tubular heating tube.

The invention discloses a pulse xenon lamp and a sealing method of the same. The pulse xenon lamp and the sealing method of the same are characterized in that two ends in a quartz tube in a xenon lamp are respectively provided with an electrode I and an electrode II along a transverse central axis; the electrode I and the electrode II are bilaterally symmetrical with a longitudinal central axis of the quartz tube; the tail of the electrode I at the right end of the longitudinal central axis of the quartz tube is fixedly connected with an electrode cap, a patchplug and a cable wire along the transverse central axis successively; the structure of the left end of the longitudinal central axis of the quartz tube is the same as the structure of the right end of the longitudinal central axis of the quartz tube; the electrode cap sleeves the outside of the port of the quartz tube, and active solders are filled between the electrode cap and the port of the quartz tube, and are heated to more than 600DEG C in a vacuum environment being less than 5*10-3Pa; and when the active solders are fused and are fully reacted with quartz glass, direct non-coupling sealing of the electrode cap and the quartz tube is completed. The sealing method of the pulse xenon lamp is easy to realize automation and large scale production of xenon lamp sealing, is simple and stable in the sealing process, is high in the vacuum sealing performance of the sealing area, and is high in structural intensity. The xenon lamp can bear large current, and the service life and working reliability of the xenon lamp are significantly improved.

The invention relates to an automatic compensation type vacuum tube connecting device and a dredging machinery with the connecting device. The connecting device is characterized by comprising a dynamic connecting pipe and a static connecting pipe; an annular flange is arranged in a port of a connecting end of the dynamic connecting pipe with the static connecting pipe; a sealing rubber, a concave ring, a spring and a circular pipe guide base coat a connecting end of the static connecting pipe with the dynamic connecting pipe from top to bottom in sequence; the top of the sealing rubber is butted against the annular flange, and the bottom is arranged in the concave ring; and the spring is butted against between the bottom of the concave ring and the top of the circular pipe guide base. The vacuum pipe connecting device consisting of the dynamic connecting pipe and the static connecting pipe can be connected and preferably sealed in the dirt sucking operation, can be released when unloading a sewage tank, and can eliminate errors generated in the manufacturing process and higher pressure stress generated in the joint process of the dynamic connecting pipe and the static connecting pipe.

The invention discloses a Sn-Ti-Cu ternary alloy solder for quartz glass sealing. The matrix of the ternary alloy solder is tin, the weight percent components of Ti and Cu introduced are Ti: 0.1%-2.0%, Cu: 0.1%-1.0%, and the atomic percent components of O introduced are 0.05%-4.9% %, the mass percentage of impurities in the ternary alloy solder is less than or equal to 0.1%. The welding temperature range of the ternary alloy solder is 650℃~800℃, and the welding vacuum degree is less than or equal to 5×10 ‑3 Pa. The ternary alloy solder does not need flux in the quartz glass sealing process, simplifies the quartz glass sealing process, and improves the vacuum sealing reliability of the quartz glass sealing. The ternary alloy solder can be widely used not only in quartz glass sealing, but also in silica glass, which has a softening temperature of not lower than 800 °C and is made of SiO 2 The mutual welding of glass, titanium, oxygen-free copper and metal with titanium coating on the surface as the main component is especially suitable for the preparation of pulsed xenon lamps, which can significantly improve the service life and working reliability of pulsed xenon lamps.

The invention relates to chemical vapor deposition equipment which comprises a shell, a reaction system, and a heating element positioned between the shell and the reaction system, wherein the reaction system is arranged in the shell, and comprises a raw material supply device and a reaction room; the heating element is arranged on the inner wall of the shell on the outer sides of the raw material supply device and the reaction room. The chemical vapor deposition equipment is characterized in that the shell comprises a shell main body and a door; an inner cavity is formed by surrounding of the shell main body and the door, and is a cuboid; the door can be opened or close one surface of the inner cavity. The chemical vapor deposition equipment, provided by the invention, can prepare materials with huge size, and realizes the preparation of the materials with huge size under the premise of possibly decreasing the volume; the single-surface door opening design enables the daily mounting and disassembly of internal components to be directly operated simply on the ground level; the control and use of a reaction furnace can be realized by less manpower; the chemical vapor deposition equipment satisfies the industrial large-scale production of preparing the materials with huge size by the CVD (Chemical Vapor Deposition) technology, improves the productivity, and reduces the production cost.