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239 results about "Solar flare" patented technology
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A solar flare is a sudden flash of increased brightness on the Sun, usually observed near its surface and in close proximity to a sunspot group. Powerful flares are often, but not always, accompanied by a coronal mass ejection. Even the most powerful flares are barely detectable in the total solar irradiance (the "solar constant").
Method utilizing compensation features in semiconductor processing
InactiveUS7202148B2Increased process windowReduce depthRadiation applicationsSemiconductor/solid-state device manufacturingEngineeringFlare
A photolithography and etch process sequence includes a photomask having a pattern with compensation features that alleviate patterning variations due to the proximity effect and depth of focus concerns during photolithography. The compensation features may be disposed near isolated or outermost lines of a device pattern. A photoresist pattern is formed to include the compensation features and the pattern etched to form a corresponding etched pattern including the compensation features. After etching, a protection material is formed over the layer and a trim mask is used to form a further photoresist pattern over the protection material. A subsequent etching pattern etches the protection material and removes the compensation features and results in the device lines being formed unaffected by proximity effects. Flare dummies may additionally be added to the mask pattern to increase pattern density and assist in endpoint detection. Flare dummies, like the compensation features, are subsequently removed by a photolithography and etching process sequence.
Owner:TAIWAN SEMICON MFG CO LTD
Photovoltaic production line
InactiveUS20090077805A1Improve bindingPhotovoltaic monitoringWave amplification devicesProduction lineQuality assurance
The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
Owner:APPLIED MATERIALS INC
Laser flare measuring device and measuring method thereof
InactiveCN101458067AAccurate measurementImprove dynamic rangePhotometry using wholly visual meansUsing optical meansMeasurement deviceExposure control
Owner:SUZHOU UNIV
Solar air-conditioning system and control method thereof
ActiveCN104734178AExtended air conditioner power levelIncrease powerSpace heating and ventilation safety systemsLighting and heating apparatusElectrical batteryControl signal
The invention discloses a solar air-conditioning system and a control method thereof. The solar air-conditioning system comprises a solar cell array, a photovoltaic converter and an air-conditioning unit. The photovoltaic converter comprises a booster circuit, a rectification and inversion grid-connected circuit and a control circuit, wherein the booster circuit is used for controlling the solar cell array to output the maximum power through maximum power output control signals, and the rectification and inversion grid-connected circuit is used for switching rectification and inversion grid-connected working states through state switching control signals, so that energy of a public electric network and energy of the solar cell array are used for supplying power to the air-conditioning unit, and the energy of the solar cell array is controlled to be fed back to the public electric network. By the adoption of the solar air-conditioning system and the control method of the solar air-conditioning system, the problems that excessive energy output by a solar cell array in the prior art can not be fed back the power grid and high costs are caused by the adoption of a storage battery are solved, and the effects that the excessive energy of solar power generation is fed back to the power grid, meanwhile, the power grades of an air conditioner are expanded, and the cost is reduced are achieved.
Owner:GREE ELECTRIC APPLIANCES INC
Non-resolving mask tiling method for flare reduction
InactiveUS6989229B2Photo-taking processesSemiconductor/solid-state device manufacturingWaferEngineering
Photoresist on a wafer is exposed using tiles on a mask that improve flare performance. Features that are not to be exposed on the photoresist correspond to features on the mask. The various features are surrounded by other features that vary and thus affect flare differently. Selected features have tiles added nearby but also far enough away to improve uniformity in the effects of flare on the various features that are intended to be present in the photoresist. The tiles are made either very small in width or partially absorbing so that the tiles are not resolved in the photoresist. Thus the tiles reduce flare but do not alter the desired pattern in the photoresist.
Owner:TAIWAN SEMICON MFG CO LTD
Long range corrections in integrated circuit layout designs
ActiveUS7234130B2CAD circuit designOriginals for photomechanical treatmentResolution enhancement technologiesImage resolution
A method and apparatus for compensating for flare intensity variations across an integrated circuit. A layout description for a physical layer of an integrated circuit or portion thereof is divided into a number of regions such as adjacent tiles. An estimate of the flare intensity in each region is determined. The flare intensity values calculated are divided into a number of ranges. In one embodiment, a data layer in a layout description is defined for each range of flare values computed. Features to be printed in an area having a flare value in a particular range are associated with a corresponding additional data layer. The features associated with each additional data layer are analyzed with a resolution enhancement technique that is selected or adjusted to compensate for differing flare values occurring in the integrated circuit.
Owner:SIEMENS PROD LIFECYCLE MANAGEMENT SOFTWARE INC
MODIS satellite high-precision monitoring method for chlorophyll-a in eutrophic lake water body
ActiveCN104820224AAchieving High-Precision EstimationReflect the space-time distributionElectromagnetic wave reradiationRayleigh scatteringEutrophication
The invention provides an MODIS satellite high-precision monitoring method for chlorophyll-a in a eutrophic lake water body. The method comprises the following steps: screening a chlorophyll-a evaluation index (BNDBI) which is sensitive to the concentration change of chlorophyll-a and not affected by highly suspended matters, thin cloud and solar flares; acquiring the quantitative relationship between BNDBI and the concentration of chlorophyll-a on the basis of biological optical model simulation; acquiring a chlorophyll-a inversion algorithm based on ground measured spectrum (Rrs) and BNDBI by referring to water body spectral information and corresponding water body chlorophyll-a concentration of 2013-2014 lake field monitoring; acquiring the quantitative relationship between the ground monitoring and remote sensing reflectance ratio (Rrs) and Rrc after simulated Rayleigh scattering correction by simulating different aerosol types and thicknesses and different solar elevation angles, satellite observation angles and azimuth angles; and extending the chlorophyll-a inversion algorithm based on ground measured spectrum data to satellite image data after Rayleigh scattering correction. Based on the method, inter-annual and inter-monthly change rules and spatial distribution of chlorophyll-a in a eutrophic lake can be acquired accurately.
Owner:NANJING INST OF GEOGRAPHY & LIMNOLOGY
Real time extracting method for satellite remote sensing sea fog characteristic quantity
InactiveCN101424741AGood for observationEasy to identifyElectromagnetic wave reradiationICT adaptationThree levelEffective radius
The invention relates to a real-time extracting method of satellite remote sensing sea fog characteristic quantity, daytime EOS / MODIS data is used and is read into a raw data file PDS, the difference of sea fog and low cloud on a spectral characteristic is analyzed in two steps that: firstly, the sea fog and the low cloud are separated, and then, the sea fog characteristic quantity is extracted, namely that a three-level identifying method is adopted to orderly filter high cloud, middle cloud, low cloud, a cloudless water body, a solar flare water body, a cloud shadow area, a sea ice and a snow cover, the sea fog detection is established, a sea fog distributing area is obtained, a file which comprises a sea fog detecting result is generated, then, the sea fog characteristic quantity of the optical thickness of a fog area, the effective radius of fog and a liquid water path are calculated according to a formula, and pictures are displayed on a microcomputer. The method not only extracts the sea fog characteristic quantity, but also can calculate the visibility and the fog top height of the fog, consequently, the quantification detection of the sea fog is realized, and a dissipation forecast of the sea fog supplies meteorological information for air safety above the sea, maritime traffic and coastal airport operation.
Owner:OCEAN UNIV OF CHINA
Fast and accurate optical proximity correction engine for incorporating long range flare effects
ActiveUS20050257187A1Shorten the timeReasonably accurateOriginals for photomechanical treatmentSpecial data processing applicationsLithography processComputational physics
A method is described for performing model-based optical proximity corrections on a mask layout used in an optical lithography process having a plurality of mask shapes. Model-based optical proximity correction is performed by computing the image intensity on selected evaluation points on the mask layout. The image intensity to be computed includes optical flare and stray light effects due to the interactions between the shapes on the mask layout. The computation of the image intensity involves sub-dividing the mask layout into a plurality of regions, each region at an increasing distance from the evaluation point. The contributions of the optical flare and stray light effects due to mask shapes in each of the regions are then determined. Finally, all the contributions thus obtained are combined to obtain the final computation of the image intensity at the selected point.
Owner:GLOBALFOUNDRIES US INC
Improving the highlight reproduction of an imaging system
InactiveUS20060256214A1Improve dynamic rangeExact reproductionTelevision system detailsColor signal processing circuitsComputer visionFlare
A method and apparatus for calibrating a sensor for highlights and for processing highlights is described. In an embodiment, a method includes identifying highlight regions in an image of a scene. The method further includes calculating flare intensity values for the image using the locations of the highlight regions. The method also includes subtracting the flare intensity values from the image.
Owner:EASTMAN KODAK CO +15
Ophthalmologic imaging apparatus
Light from a light source is divided into S-polarization and P-polarization light. The P-polarization light is incident to a retinal illumination system for high-power image and the S-polarization light is incident to a retinal illumination system for low-power image. These lights are set center illumination and ring illumination by aperture diaphragms. Reflection light flux from a cornea under the high-power retina illumination light passes through the center of a perforated mirror, and thus light reflected from the retina and the perforated mirror is received through a high-power optical system to achieve an excellent retinal image having no flare. Likewise, reflection light flux from the cornea under the low-power retina illumination light is reflected from the perforated mirror, and thus light reflected from the retina and passing through the center of the hole is received through a low-power optical system to achieve an excellent retinal image having no flare.
Owner:KK TOPCON
Risk assessment for relief pressure system
Quantitative Risk Analysis (QRA) can be applied to provide a more realistic assessment of the risk associated with vessel accumulation due to common mode scenarios. The QRA process takes the results of a traditional flare study and QRA inputs such as the frequencies of the common mode scenarios and the layers of protection that will tend to reduce the severity of the common mode scenario, and generates an system risk profile, such as an accumulation versus frequency relationship for each vessel discharging to the relief header. This relationship provides an estimate of the overall risk associated with the relief header system. The QRA program makes the above analysis process possible by automating the generation, execution, and interpretation of the many possible permutations that are required to characterize the system.
Owner:SIEMENS ENERGY INC
Daytime and nighttime sea fog detecting method based on polarorbiting meteorological satellite remote sense
InactiveCN101452078ARealize real-time monitoringElectromagnetic wave reradiationICT adaptationOriginal dataMeteorological satellite
The present invention relates to a method for detecting sea fog at daytime and night with polar-orbiting meteorological satellite. The polar-orbiting satellite information is used. The original data file is read into. The medium-high cloud, the clear-air water, the solar flare water, the cloud shadow areas, the sea-ice-snow sheets, non-warm low clouds, warm broken low clouds and wind edges are respectively filtered with a three-stage determining method through comprehensively using the multi-channel optical spectrum information, NDVI index, NDSI index and average month SST in thirty years. The sea fog arrangement areas are obtained and the file comprising sea fog detecting result is generated. Namely the image display can be executed on a microcomputer with GRADS drawing software. The method according to the invention separates the sea fog from low cloud thereby realizing the real-time monitoring of sea fog. Effective meteorological information with real time monitoring is provided for the safe flying over sea surface, marine traffic transportation, seaport and coasting airport operation.
Owner:NAT SATELLITE METEOROLOGICAL CENT +1
Preparation of porous pyrophoric iron using sol-gel methods
InactiveUS20060042417A1Easy to oxidizePrevent spontaneous combustionHigh surface areaChemical reduction
New sol-gel methods can be employed to generate high surface area porous iron (III) oxide-based solids. Chemical reduction of such porous solids at low temperatures allows the preparation of high surface area porous iron with little sintering, with the only byproduct being water. The material is readily pyrophoric and has utility in new decoy flares. The material, prepared by this synthetic route, eliminates the use of hot caustic leaching solutions. It does not require the incorporation of any hazardous materials or processes that are not already used in current production methods.
Owner:RGT UNIV OF CALIFORNIA
Solar air-conditioner
InactiveCN101666529AEfficient use ofImprove economyChemical industryEvaporators/condensersAutomatic controlLithium bromide
The invention relates to a solar air-conditioner comprising a U-shaped heat pipe collector, a lithium bromide absorption-type refrigerating machine, a heat storage water tank, a cold storage water tank, a circulation pump, a cooling tower, an air-cooled coil pipe, an auxiliary oil-fired boiler and an automatic control system. The lithium bromide absorption-type refrigerating machine comprises a high-pressure generator, a low-pressure generator, an evaporator, an absorber, a cooling tower, a cooled heat exchanger, a concentrator and a generator pump. Lithium bromide-water separators are respectively arranged in the high-pressure generator and the low-pressure generator. Surfactants are added in refrigerant solution. The solar air-conditioner does not need to consume lots of energy and has low requirement on heat energy, can utilize various low-grade heat energy besides the solar heat sources, and has good electricity saving and energy saving effects and high economic efficiency. The cold capacity regulating range is wide. Along with the change of external load, the unit can carry out stepless regulation on the cooling capacity within the range from 10% to 100%, and during low load regulation, the heat efficiency hardly falls and the properties are stable; therefore, the solar air-conditioner can better adapt to the requirement of variable load.
Owner:黄山创鑫企业管理咨询有限公司
Sequential and coordinated flashing of electronic roadside flares with active energy conservation
Electronic light emitting flares and related methods. Flares of the present invention include various features such as self-synchronization, remote control, motion-actuated or percussion-actuated features, dynamic shifting between side-emitting and top-emitting light emitters in response to changes in positional orientation (e.g., vertical vs. horizontal) of the flare; overrides to cause continued emission from side-emitting or top-emitting light emitters irrespective of changes in the flare's positional orientation; use of the flare(s) for illumination of traffic cones and other hazard marking or traffic safety objects or devices, group on / off features, frequency specificity to facilitate use of separate groups of flares in proximity to one another, selection and changing of flashing patterns and others.
Owner:SELEVAN JAMES R +1
Sequential and Coordinated Flashing of Electronic Roadside Flares With Active Energy Conservation
Electronic light emitting flares and related methods. Flares of the present invention include various features such as self-synchronization, remote control, motion-actuated or percussion-actuated features, dynamic shifting between side-emitting and top-emitting light emitters in response to changes in positional orientation (e.g., vertical vs. horizontal) of the flare; overrides to cause continued emission from side-emitting or top-emitting light emitters irrespective of changes in the flare's positional orientation; use of the flare(s) for illumination of traffic cones and other hazard marking or traffic safety objects or devices, group on / off features, frequency specificity to facilitate use of separate groups of flares in proximity to one another, selection and changing of flashing patterns and others.
Owner:SELEVAN JAMES R +1
Radially-oriented planar surfaces for flare reduction in panoramic cameras
InactiveUS20020146248A1Reducing unwanted reflectionPanoramic photographyCamera body detailsVertical planeEngineering
A panoramic imaging system includes a convex reflector, a camera, a transparent cylinder for mounting the convex reflector to the camera, and a first radially-oriented planar member positioned in the transparent cylinder between the convex reflector and the camera. A second radially-oriented planar member can be positioned in the transparent cylinder between the convex reflector and the camera. The first and second radially-oriented planar members would preferably lie in perpendicular planes, however, they may lie in non-perpendicular planes. A mirror mount for a panoramic imaging system includes a convex reflector, a transparent cylinder for supporting the convex reflector, means for connecting a camera to the transparent cylinder, and a first radially-oriented planar member positioned in the transparent cylinder between the convex reflector and the camera. A method of reducing unwanted reflections in the panoramic imaging system is also included.
Owner:360AI SOLUTIONS LLC
Method of characterizing flare
ActiveUS20050270523A1Accurate featuresOptically investigating flaws/contaminationPhotomechanical exposure apparatusFlareSurface measurement
A method of measuring flare in an optical lithographic system utilizes an exposure mask with first and second discrete opaque features each having rotational symmetry of order greater than four and of different respective areas. The exposure mask is positioned in the lithographic system such that actinic radiation emitted by the lithographic system illuminates the sensitive surface of an exposure target through the exposure mask. The extent to which regions of the sensitive surface that are within the geometric image of a feature of the exposure mask are exposed to actinic radiation during due to flare is measured.
Owner:CADENCE DESIGN SYST INC
Solar air conditioning device
InactiveUS7661422B2Improve insulation effectImprove protectionSolar heating energyRoof covering using slabs/sheetsEngineeringSolar energy harvesting
A solar air conditioning device (100) comprises a solar collector assembly (30), an inlet assembly (10) at an entrance of the solar collector assembly, and an outlet assembly (50) at an exit of the solar collector assembly. The solar collector assembly includes a heat-absorbing set (31) and a transparent panel (38) being assembled to a top of the heat-absorbing set. The heat-absorbing set comprises a plurality of heat-absorbing units (32) engaged with each other. A distance between the inlet assembly and the outlet assembly is equal to a longitudinal length of single heat-absorbing unit. The heat-absorbing set defines an air channel with the transparent panel and a heat-absorbing channel below the air channel. The inlet and outlet assemblies are in fluidic communication with the heat-absorbing channel.
Owner:FU ZHUN PRECISION IND SHENZHEN +1
Solar air conditioner and solar air-conditioning system consisting of solar air conditioner
InactiveCN102005975AConducive to energy saving and emission reductionBatteries circuit arrangementsPhotovoltaicsElectricityElectric power system
The invention discloses a solar air conditioner and a solar air-conditioning system consisting of the solar air conditioner. The solar air conditioner comprises a solar electrical energy generation unit, a DC-DC converting unit, a main control unit and a variable frequency air-conditioning unit connected in turn, wherein the solar electrical energy generation unit and the DC-DC converting unit are connected to an electric power storage unit together; and the solar air-conditioning system comprises the solar air conditioner and at least one set of additional solar air conditioners. The solar air conditioner and the solar air-conditioning system can invert and transmit redundant electrical energy to the mains supply after the electric power storage unit is charged through a DC-AC inverter, so the solar air conditioner and the solar air-conditioning system are favorable for energy saving and emission reduction of an electric power system. But the solar air-conditioning system can combine a plurality of the solar air conditioners for use, uniformly uses each solar electrical energy generation unit to supply power to the variable frequency air-conditioning unit, or supplies the generated electrical energy to the mains supply by using a uniform electrical power transmission unit.
Owner:GUANGDONG MIDEA ELECTRIC APPLIANCES CO LTD
Incorporation of a phase map into fast model-based optical proximity correction simulation kernels to account for near and mid-range flare
InactiveUS20050091013A1Analogue computers for electric apparatusSemiconductor/solid-state device manufacturingFast Fourier transformReal arithmetic
A first method to compute a phase map within an optical proximity correction simulation kernel utilizes simulated wavefront information from randomly generated data. A second method uses measured data from optical tools. A phase map is created by analytically embedding a randomly generated two-dimensional array of complex numbers of wavefront information, and performing an inverse Fourier Transform on the resultant array. A filtering function requires the amplitude of each element of the array to be multiplied by a Gaussian function. A power law is then applied to the array. The elements of the array are shuffled, and converted from the phasor form to real / imaginary form. A two-dimensional Fast Fourier Transform is applied. The array is then unshuffled, and converted back to phasor form.
Owner:GLOBALFOUNDRIES INC
Surge suppression system for medium and high voltage
ActiveUS20160126738A1Guaranteed to workInhibit currentReactive power adjustment/elimination/compensationEmergency protective arrangements for automatic disconnectionCascading failurePower utility
A system of surge suppressor units is connected at multiple locations on a power transmission and distribution grid to provide grid level protection against various disturbances before such disturbances can reach or affect facility level equipment. The surge suppressor units effectively prevent major voltage and current spikes from impacting the grid. In addition, the surge suppressor units included various integration features which provide diagnostic and remote reporting capabilities required by most utility operations. As such, the surge suppressor units protect grid level components from major events such as natural geomagnetic disturbances (solar flares), extreme electrical events (lightning) and human-generated events (EMPs) and cascading failures on the power grid.
Owner:ASATOR GLOBAL TECH LLC
Optical scanning device, image forming apparatus, and method of reducing noises in optical scanning device
An optical scanning device includes a deflector that deflects light fluxes emitted from light sources and rotates in a first direction, optical systems that direct deflected light fluxes onto subject surfaces, and a member that prevents a flare beam reflected by one of the optical systems from entering another one of the optical systems. The deflector includes first edges in the first direction and the member includes second edges arranged in a second direction perpendicular to the first direction. The second edges are out of alignment with each other in the first direction so that a first edge does not pass all of the second edges simultaneously.
Owner:RICOH KK
Fast and accurate optical proximity correction engine for incorporating long range flare effects
ActiveUS7131104B2Shorten the timeAccurate solutionOriginals for photomechanical treatmentSpecial data processing applicationsLithography processFlare
A method is described for performing model-based optical proximity corrections on a mask layout used in an optical lithography process having a plurality of mask shapes. Model-based optical proximity correction is performed by computing the image intensity on selected evaluation points on the mask layout. The image intensity to be computed includes optical flare and stray light effects due to the interactions between the shapes on the mask layout. The computation of the image intensity involves sub-dividing the mask layout into a plurality of regions, each region at an increasing distance from the evaluation point. The contributions of the optical flare and stray light effects due to mask shapes in each of the regions are then determined. Finally, all the contributions thus obtained are combined to obtain the final computation of the image intensity at the selected point.
Owner:GLOBALFOUNDRIES U S INC
Reference feature design for flare location monitor in perpendicular write pole process
A method for measuring recession in a wafer undergoing an asymmetrical ion mill process. The method includes the formation of first and second reference features and possibly a dummy feature. The reference features are constructed such that the location of the midpoint between them is unaffected by the asymmetrical ion mill. By measuring the distance between a portion of the dummy feature and the midpoint between the reference features, the amount of recession of the dummy feature can be measured. The measurement can be used to calculate the relative location of the flare to the read sensor rear edge through overlay information. The reference features can be constructed as a pair of isosceles triangles with apexes that face one another. By keeping the angles of the sides of the features steep (ie. nearly parallel with the direction in which the ion mill is asymmetrical) the amount of material consumed on each of the reference features is substantially equal and the midpoint between the reference features is substantially stationary.
Owner:WESTERN DIGITAL TECH INC
Ship target detection method based on infrared remote sensing image
ActiveCN106709426AReduce false alarm rateSuppress noiseImage enhancementImage analysisInfrared remote sensingWind wave
The invention puts forward a ship target detection method based on an infrared remote sensing image. The method comprises the following steps that: S1: carrying out water-coast separation on an infrared remote sensing image, and segmenting a sea area image which contains a ship target; S2: carrying out contrast enhancement processing on the sea area image obtained after the water-coast separation is carried out, highlighting the ship target in the image, and selecting the candidate area of the ship target according to the highlighted ship target; and S3: determining a ship suspected target in the candidate area, and extracting the ship target according to the personalized features of the ship. Under a situation of complex background interference including wind waves, cloud backgrounds, ship tracks, solar flares, islands and the like, the ship target can be accurately detected in real time.
Owner:SHANGHAI SPACEFLIGHT INST OF TT&C & TELECOMM
Measurement Method, Exposure Method, and Device Manufacturing Method
ActiveUS20080068595A1Short timeImprove productivityPhotometrySemiconductor/solid-state device manufacturingResistOptical axis
Light is irradiated on a light-shielding pattern on an object surface side of a projection optical system and light intensity distribution of the light having passed through the projection optical system and slits is detected while slits of an aerial image measuring unit on the image plane side of the projection optical system are moved within a plane perpendicular to the optical axis of the projection optical system. The information concerning the flare of the projection optical system is computed from the light intensity distribution, so that the influence of resist coated on a wafer used in a conventional exposing method can be eliminated, and highly accurate measurement of information concerning the flare can be realized. Further, measurement of information concerning the flare can be performed in a short time comparing to the exposing method because development process or the like of the wafer is not necessary.
Owner:NIKON CORP
Long range corrections in integrated circuit layout designs
ActiveUS20050216878A1CAD circuit designOriginals for photomechanical treatmentResolution enhancement technologiesImage resolution
A method and apparatus for compensating for flare intensity variations across an integrated circuit. A layout description for a physical layer of an integrated circuit or portion thereof is divided into a number of regions such as adjacent tiles. An estimate of the flare intensity in each region is determined. The flare intensity values calculated are divided into a number of ranges. In one embodiment, a data layer in a layout description is defined for each range of flare values computed. Features to be printed in an area having a flare value in a particular range are associated with a corresponding additional data layer. The features associated with each additional data layer are analyzed with a resolution enhancement technique that is selected or adjusted to compensate for differing flare values occurring in the integrated circuit.
Owner:SIEMENS PROD LIFECYCLE MANAGEMENT SOFTWARE INC
Test photomask, flare evaluation method, and flare compensation method
InactiveUS6986973B2Easily and accuratelySemiconductor/solid-state device manufacturingCharacter and pattern recognitionBand shapeLine width
Through use of a line pattern which becomes a pattern under measurement and a zone pattern in a zonal shape which becomes a flare causing pattern forming a light transmission region which surrounds the line pattern and causes local flare to occur on the line pattern, the effect of the local flare due to the zone pattern on the line pattern is measured as a line width of the line pattern for evaluation. Further, this measurement value is used to compensate the effect of the local flare on each real pattern.
Owner:FUJITSU SEMICON LTD
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