An illuminating light modulating device modulates at least one of
wavelength, phase, intensity, polarization, and coherency of the light emitted to an object by an illuminating device. A
pupil modulating device is disposed near a
pupil plane of an objective lens, and modulates at least one of phase, intensity and direction of polarization of the
luminous flux including the information of the object. An image
pickup device is disposed on a plane on which the image of the object is formed by the objective lens and an
imaging lens, and picks up the image of the object. An
image analysis device analyzes the image of the object picked up by the image
pickup device. A parameter decision device adjusts the modulation amounts of the illuminating light modulating device and the
pupil modulating device by using the image information of the object analyzed by the
image analysis device.