The invention discloses a nano
cutting depth high-speed single-point
scratch test device and a test method thereof. The device comprises a
workbench, an air flotation rotary table, a test piece fixture, a test piece, a Z-direction feeding device, a nano motion platform, a
force sensor and a scratch tool, wherein a micro
convex structure with controllable length and height is machined in the to-be-scratched position of the test piece. The scratch speed is increased from mu m / s to m / s, and the
machining speed of
abrasive particles in the ultra-precise
grinding process is restored really. Scratch force signals under different nano
cutting depth conditions are accurately collected under the high-speed scratch condition, and the scratch force-scratch depth correspondence is explicit. The micro
convex structure is constructed on the surface of the test piece, the condition that very long scratches are left on the surface of the whole
wafer by
a diamond needle point is avoided, abundant
test data are provided in shorter scratches, the content of effective information in the unit scratch length is greatly increased, following scratch analysis and feature identification of remaining scratches are facilitated, and the integrity of the scratch tool is guaranteed.