118 results about "Oblique illumination" patented technology

The laser beam machine of the present invention includes: an XY stage on which to rest a workpiece with multiple machining objects arrayed on it, and which moves the workpiece in an XY direction on the basis of NC data; an image acquisition head which is provided in an image acquisition station and has oblique illumination optical system and detection optical system; and a laser machining head which is provided in a laser machining station and has a laser light source, an XY optical beam deflector for deflecting a laser beam in the XY direction on the basis of the deflection control data obtained in accordance with the image signals from each machining object that have been acquired by the image acquisition head, and an irradiation lens for admitting the above-deflected laser beam into each machining object from a substantially perpendicular direction.

The present invention is characterized by the following: incident illumination and oblique illumination are performed on a scratch and a foreign material, which have been made on a surface of a polished or a ground insulating layer, with substantially the same luminous flux; and on the basis of a correlation such as a ratio of intensity of scattered light generated by the shallow scratch and the foreign material between the incident illumination and the oblique illumination, the shallow scratch is discriminated from the foreign material.

An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns performs one of the multi-functions. Basically the sub-columns take normal illumination to get high image resolutions, but one or more may take oblique illuminations to get high image contrasts.

A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.

A visual inspection apparatus includes an upper illuminator, a lower illuminator, a side illuminator, and a pair of inclined illuminators, which illuminate the peripheral edge of a wafer, and illuminates the peripheral edge of the wafer brightly. A gap is formed in the upper illuminator and illumination light of an epi-illumination portion is injected through the gap. The illumination light of the epi-illumination portion is refracted and reflected by a first mirror to illuminate the peripheral edge of the wafer. The illumination position is changed by moving second mirrors together as needed. An image of the peripheral edge is acquired in an imaging portion disposed at the same axis as the epi-illumination portion.

To detect a bridge defect between lines of a line pattern formed on a sample at pitches narrower than the wavelength of inspection light, a defect inspection device is configured to comprise: a light source which emits laser; a vertical illumination unit which applies the laser to the sample from a vertical direction via an objective lens by converting the laser into linearly polarized light by using a polarization conversion unit in a state polarized in a direction orthogonal to the longitudinal direction of the line pattern; an oblique illumination unit which applies the laser to the sample from an oblique direction; a detection optical unit including an optical filter which selectively transmits a scattered light component from the defect by converting the polarization state of the reflected/scattered light; and a signal processing unit which detects the defect on the sample by processing a detection signal.

The invention concerns an apparatus for simultaneous zero-degree and oblique illumination for an optical viewing device, in particular a stereoscopic surgical microscope, which contains a shiftable prism combination (3) for deflecting a first illumination sub-beam a long distance from the optical axis (12) of the main objective in order to obtain an oblique illumination beam (9) (oblique illumination), and for deflecting a second illumination sub-beam (8) a short distance from the optical axis (12) of the main objective in order to obtain a zero-degree illumination (8).

The present invention provides a compact liquid crystal panel detection device which can determine a defect address rapidly and accurately. The detection device comprises a first polarizing film and a second polarizing film which are arranged at the upper and lower parts of a liquid crystal panel on a workbench respectively; a backlight unit which irradiates the liquid crystal panel at a right angle with the lower surface, from the lower surface of the liquid crystal panel on the workbench, and via the second polarizing film; an inclined illumination light source which irradiates the liquid crystal panel on the workbench aslant from the lower part of the lower surface; a probe unit for applying voltages on the pixels of the liquid crystal panel on the workbench to detect the bright spots of the liquid crystal panel; a camera head for shooting the upper surface of the liquid crystal panel under the state of selectively receiving any one of the irradiation light coming from the backlight unit and the inclined irradiation light coming from the inclined illumination light source, and via the first polarizing film; and a reflecting part for guiding the inclined illumination light to the lower surface of the liquid crystal panel in a manner that the inclined illumination light is irradiated to the liquid crystal panel at an appropriate incident angle.

The present disclosure provides an imaging system, including methods and apparatus, with oblique illumination. In an exemplary method of imaging, a sample may be illuminated obliquely with excitation light generated by only a subset of a plurality of light sources mounted to an annular frame. An image may be detected, with the image formed with photoluminescence induced in the sample by the excitation light and received from a central opening of the annular frame.