The invention relates to a locking control method of a large-travel nano-displacement and positioning
macro-motion table as well as a
system thereof. The method comprises the operating steps: (1) a
communication interface of a computer (upper computer ) sends an instruction for controlling, firstly, a
macro-
positioning system is started up to drive the
macro-motion table and a micro-motion worktable to move together, and the macro-positioning is finished when the detected positioning error is smaller than the switching threshold value; (2) the computer controls and locks the macro-motion worktable, and is switched to a micro-
positioning system dynamically in the meanwhile; and (3) the micro-
positioning system controls the micro-motion worktable to further reach the target location required by the
system and complete the positioning. The
system mainly comprises: the macro-motion table and the micro-motion worktable as well as corresponding driving systems; a
grating feedback system; a PMAC controller; a
laser interferometer calibration system; a computer system; and a
vibration isolation and
noise elimination device (an air floatation
vibration isolation platform) and the like. The
hardware structure of the existing system is configured (a piezoelectric
ceramic driving device) by adopting the method as required, when the macro-motion table meets the positioning requirements and stops the movement, piezoelectric ceramics lock the table, thereby improving the positioning accuracy of the system.