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178results about How to "Rapid temperature measurement" patented technology

In-situ hybrid deposition of high dielectric constant films using atomic layer deposition and chemical vapor deposition

An in-situ hybrid film deposition method for forming a high-k dielectric film on a plurality of substrates in a batch processing system. The method includes loading the plurality of substrates into a process chamber of the batch processing system, depositing by atomic layer deposition (ALD) a first portion of a high-k dielectric film on the plurality of substrates, after depositing the first portion, and without removing the plurality of substrates from the process chamber, depositing by chemical vapor deposition (CVD) a second portion of the high-k dielectric film on the first portion, and removing the plurality of substrates from the process chamber. The method can further include alternatingly repeating the deposition of the first and second portions until the high-k dielectric film has a desired thickness. The method can still further include pre-treating the substrates and post-treating the high-k dielectric film in-situ prior to the removing.
Owner:TOKYO ELECTRON LTD

Magnetic field measuring apparatus

Providing: quickly brining a vapor cell 119 to a desired temperature when retaining the heat of the vapor cell 119 to enhance the magnetic field detection performance of an optically pumped magnetometer; preventing adherence of atoms in the vapor cell 119 to a laser irradiation light passing-through part of the vapor cell 119; downsizing the periphery of the vapor cell 119; and suppressing the effect of a magnetic field from a heater used to retain the heat of the vapor cell 119. The present invention includes: a transparent film heater 118 provided to a laser irradiation light passing-through part of a vapor cell 119, the vapor cell 119 being a magnetic detection part of the optically pumped magnetometer; a temperature detector 115 provided at a center part of a side of the vapor cell 119; a temperature regulator 111 that sets a desired temperature for heat retention of the vapor cell 119 and compares the desired temperature and the actual temperature of the vapor cell measured by the temperature detector 115; an operation unit 112 that upon receipt of a PID control signal for temperature control from the temperature regulator 111, performs a temperature adjustment and switches on/off, in a pulsed manner, current applied to the transparent film heater 118 after the desired temperature is reached; and a heater power supply 113 that upon receipt of an operation signal from the operation unit 112, applies current to the transparent film heater 118.
Owner:HITACHI HIGH-TECH CORP

Magnetic field measuring optically pumped magnetometer apparatus

Providing: quickly brining a vapor cell 119 to a desired temperature when retaining the heat of the vapor cell 119 to enhance the magnetic field detection performance of an optically pumped magnetometer; preventing adherence of atoms in the vapor cell 119 to a laser irradiation light passing-through part of the vapor cell 119; downsizing the periphery of the vapor cell 119; and suppressing the effect of a magnetic field from a heater used to retain the heat of the vapor cell 119. The present invention includes: a transparent film heater 118 provided to a laser irradiation light passing-through part of a vapor cell 119, the vapor cell 119 being a magnetic detection part of the optically pumped magnetometer; a temperature detector 115 provided at a center part of a side of the vapor cell 119; a temperature regulator 111 that sets a desired temperature for heat retention of the vapor cell 119 and compares the desired temperature and the actual temperature of the vapor cell measured by the temperature detector 115; an operation unit 112 that upon receipt of a PID control signal for temperature control from the temperature regulator 111, performs a temperature adjustment and switches on / off, in a pulsed manner, current applied to the transparent film heater 118 after the desired temperature is reached; and a heater power supply 113 that upon receipt of an operation signal from the operation unit 112, applies current to the transparent film heater 118.
Owner:HITACHI HIGH-TECH CORP

Laser roll joining method for dissimilar metals and laser roll joining apparatus

An object is to provide a laser roll joining process for dissimilar metals capable of improving the joining strength of a joint by increasing the amount of generation of ductile intermetallic compound and a laser roll joining equipment. A laser roll joining process for dissimilar metals for joining a first metal sheet 3 and a second metal sheet 4 of different materials held in non-contact state by after only the first metal sheet 3 is heated by laser irradiation, pressing a heated portion of the first metal sheet 3 against the second metal sheet 4 with a pressure welding roller 15 so that they are brought into a firm contact with each other and subjected to plastic deformation, wherein a joining portion between the first metal sheet 3 and the second metal sheet 4 is cooled.
Owner:KUTSUNA MUNEHARU +1
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