The invention discloses a static-driving
capacitance-detection micro
solid modal gyroscope belong to the technical field of micro electro mechanical systems, which comprises an elastic micro vibrator, and a reference vibration driving
electrode, a reference vibration induction
electrode, a
Coriolis force induction
electrode which are positioned at the periphery of the elastic micro vibrator, wherein two consolidated special vibration
modes, i.e. a reference vibration mode and a sensing vibration mode, of the elastic micro vibrator are used for working, static power is adopted for driving, andvariable
capacitance mechanism is used for detecting the reference vibration and
Coriolis force induction vibration. The
gyroscope has no independent
mass spring structure so as to have the anti-
impact and anti-vibration capability, can be used in the severe environment; the
gyroscope has high working efficiency so as to be beneficial to enlarge the measurement bandwidth of the gyroscope and reduce
noise, the gyroscope can work under the atmospheric environment so as to reduce the packaging difficulty and has improved reliability and reduced production cost; and the static exciting and the
capacitance detection are adopted, so that the micro
solid modal gyroscope and a
CMOS (Complementary
Metal-
Oxide-
Semiconductor Transistor) measurement and
control circuit can be integrated, the batched production is easy, and simultaneously, the influence to the parasitic resistance or the capacitance can be reduced.