The invention relates to an integrated passive device
wafer-level packaging three-dimensional stacked structure and a manufacturing method. The integrated passive device
wafer-level packaging three-dimensional stacked structure comprises a
wafer-level packaging
chip and an IPD
chip. The IPD
chip comprises a glass substrate, wherein an IPD device and a
metal wiring layer are arranged on the front surface of the glass substrate, the back surface of the glass substrate is etched to form TGV holes, back surface
metal wiring
layers are arranged on the back surface of the glass substrate and the inner surfaces of the TGV holes, a
welding ball is arranged on a
welding pad of each back surface
metal wiring layer, and the
welding balls are connected with a PCB. The manufacturing method of the three-dimensional stacked structure comprises the following steps that (1) the wafer-level packaging chip and the IPD chip of the glass substrate are stacked; (2) the back surface of the IPD chip is etched to form the TGV holes, the back surface metal wiring layer is manufactured on the back surface of the glass substrate; (3) the back surface metal wiring layer is etched into two insulated parts; the welding pads and welding balls are manufactured on the two parts of the back surface metal wiring layer, and the welding balls are connected with the PCB. By means of the integrated passive device wafer-level packaging three-dimensional stacked structure and the manufacturing method, short-distance
interconnection between the chip and the IPD device is achieved, and the electric quality is improved.