The invention relates to an MEMS micro-lens driven by three
piezoelectric cantilever beams and a manufacturing method thereof and belongs to the technical field of
piezoelectric MEMS appliance designs and
integrated manufacturing. The MEMS micro-lens comprises a micro-reflecting mirror surface, the
piezoelectric cantilever beams and arched bent elastic narrow beams, wherein each of the
piezoelectric cantilever beams is formed by fixing a PZT driving membrane with more than 2 mu m thickness on the surface of a
silicon cantilever beam; the three piezoelectric
cantilever beams are connected with the micro-lens micro-reflecting mirror surface through three arched bent elastic narrow beams respectively; and the piezoelectric
cantilever beams are distributed in a way that an included angle of 120 degrees is formed between every two piezoelectric cantilever beams. The manufacturing method comprises the following steps of: firstly, preparing a piezoelectric thick membrane on a substrate and
etching piezoelectric cantilever beam patterns on the piezoelectric thick membrane; secondly, preparing a Au / Cr two-layer
metal top
electrode and a
micro micro-reflecting mirror
surface pattern on the PZT piezoelectric thick membrane; and finally,
etching a
Si substrate on the front and back faces so as to form the MEMS micro-lens driven by the three piezoelectric cantilever beams. The MEMS micro-lens has the advantages of many deflecting directions, strong driving force of the PZT thick membrane and low optical loss. The manufacturing process is compatible with the MEMS process, so that the MEMS micro-lens has the potential of
mass production and can be widely applied in the field of
optical communication.