The invention provides a lateral power device with a mixed conduction mode and a preparation method thereof, comprising a P-type substrate, a buried oxide layer, an N-type drift region, a P-type base region, an N-type buffer region, an N-type source region, a P-type Contact region, P-type collector region, emitter, collector, gate dielectric layer, gate electrode, N-type drift region surface has N-type strips and P-type strips, N-type strips and P-type strips are perpendicular to the device drift region surface The channel length direction is arranged alternately, and there is a P-type RESURF layer in the drift region under the N-type strip and P-type strip; there is a dielectric groove structure between the N-type strip, P-type strip, and P-type RESURF layer and the N-type buffer zone; The concentration of N-type strips and P-type strips is greater than the concentration of N-type drift regions; the depth of the dielectric groove structure is not less than the depth of N-type strips, P-type strips and P-type collector regions; the invention realizes surface SJ-LDMOS and LIGBT The mixed conduction can obtain lower turn-on voltage drop, higher withstand voltage, faster switching speed, lower turn-off loss, and eliminate the snapback effect, greatly improving device performance.