The invention discloses a high-sensitivity
magnetic field measurement method and device and belongs to the field of an electronic measurement instrument. The device comprises a
magnetic field measurement
chip and a test
signal processing method. The
chip comprises at least two weakly coupled resonators, a driving
electrode, a detection
electrode and an outer gate-type structure. The
AC current isapplied to the weakly coupled resonators through a driving
electrode, and when the
chip is placed in a vertical
magnetic field, the resonators are subjected to changed
Lorentz force to generate simpleharmonic vibration; when the external magnetic field changes, a vibration state of the resonators changes accordingly, moreover, the
DC current is applied to the gate-type structure, the gate-type structure is subjected to
Lorentz force in the horizontal direction, and the electrostatic
negative stiffness between the gate-type structure and the weakly coupled resonators is changed, so
energy distribution of a weakly coupled
resonator system is severely unbalanced. Two sets of detection electrodes are designed on two sides of an output
resonator, single-
resonator amplitude difference detectionis achieved, feed-through
capacitance interference is eliminated, and high-sensitivity measurement of the weak magnetic
field intensity can be achieved by measuring resonator amplitude difference. The device is advantaged in that real-time measurement of the weak magnetic field can be realized, the anti-interference capability is high, and use significance is high.