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282results about How to "Small coefficient" patented technology

Quartz member for semiconductor manufacturing equipment and method for metal analysis in quartz member

Quartz member such as a quartz tube for semiconductor manufacturing equipment capable of heat treating a substrate to be treated without causing contamination, a manufacturing method of such quartz member, thermal treatment equipment furnished with such quartz member, and an analysis method of metal in quartz member are provided. A quartz specimen is immersed in hydrofluoric acid to expose a layer to be analyzed located at a prescribed depth. On an exposed surface, a decomposition liquid such as hydrofluoric acid or nitric acid is dripped to decompose only an extremely thin layer to be analyzed, followed by recovering of the decomposition liquid. The decomposition liquid is quantitatively analyzed by use of atomic absorption spectroscopy (AAS) or the like to measure an amount of metal contained in the decomposition liquid. From a difference of thicknesses before and after the decomposition and an area of dripped decomposition liquid, a volume of a decomposed layer to be analyzed is obtained. From this and the amount of metal contained in the decomposition liquid, a concentration of metal contained in the layer to be analyzed, in addition a diffusion coefficient of a layer to be analyzed is calculated. With thus obtained diffusion coefficient as an index, quartz material in which metal diffuses with difficulty is sorted out. With thus sorted quartz material, a quartz member used for semiconductor manufacturing equipment such as a quartz tube is manufactured.
Owner:TOKYO ELECTRON LTD

Infrared small target detection method for multi-scale spatio-temporal union filtering under complex background

InactiveCN104657945AEliminates ghosting effectsEnhance potential targetsImage enhancementImage intensificationImage identification
The invention discloses an infrared small target detection method for multi-scale spatio-temporal union filtering under a complex background. The method concretely comprises the following steps: 1, inhibiting a ghost effect, improving the image identification degree, establishing a multi-scale bilateral time-domain high-pass filtering nonuniformity correction model, and obtaining an infrared nonuniformity correction image; 2, enhancing the local contrast of a small target, establishing an image airspace complexity weighted-information entropy model by adopting the airspace complexity factors of the infrared nonuniformity correction image, and protruding the information entropy of a small target region; 3, improving the detection rate of the infrared small target, reducing the false alarm rate, establishing a multi-scale spatio-temporal union filtering model, and self-adaptively detecting small targets with different scales. The method is an infrared small target detection algorithm for multi-scale spatio-temporal union filtering under the complex background, and enriches the detection technology for the small targets with different scales.
Owner:NANCHANG HANGKONG UNIVERSITY

Silicon carbide porous body

ActiveUS20100218473A1Heat capacity per unit volume of be increaseSmall coefficientCombination devicesExhaust apparatusOxideMaterials science
There is provided a silicon carbide porous article containing silicon carbide particles as an aggregate and an oxide as a bonding material. The silicon carbide particles are bonded together in a state that pores are held among the silicon carbide particles, and an additive amount of the oxide is 0.5 g / m2 or more and below 3.0 g / m2 with respect to a surface area of the silicon carbide particles.
Owner:NGK INSULATORS LTD

X-ray detector and method for production of x-ray images with spectral resolution

The invention concerns an x-ray detector with a plurality of layers arranged one top of one another in the incident direction of the x-rays, whereby each of the layers comprises at least one photodiode and a luminophore layer applied thereon.
Owner:SIEMENS HEALTHCARE GMBH
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