A method of producing spatial fine structures comprises the steps of: selecting a
luminophore from the group of luminophores displaying two different states, one of the two states being an
active state in which
luminescence light is obtainable from the
luminophore, the other of the two states being an inactive state in which no
luminescence light is obtainable from the
luminophore, and the luminophore being reversibly, but essentially completely, transferable out the one state into the other state by means of an optical
signal; adding the luminophore to a material; forming a spatial
fine structure of the material; and
fluorescence-microscopically examining whether the desired
fine structure is present. The step of
fluorescence-microscopically examining comprises the sub-steps of: outside measuring points of interest, transferring the luminophore into the other state with the optical
signal, the luminophore being essentially completely transferred into the inactive state outside the measuring points, and measuring
luminescence light only emitted by the luminophore in the
active state, to even resolve lines of the
fine structure at a distance of less than 100 nm.