The invention discloses a MEMS closed-loop
accelerometer based on rigidity compensation. The MEMS closed-loop
accelerometer based on rigidity compensation comprises an upper half part and a lower halfpart which are centrosymmetric along the
accelerometer, each of the upper half part and the
lower half part comprises a substrate, an
anchor point is fixed on each substrate, an insulating layer is arranged on each substrate, each insulating layer is provided with a sensitive device layer, and each sensitive device layer comprises a sensitive
mass block, a supporting beam, a force feedback comb tooth unit, a detection comb tooth unit and a rigidity compensation unit; the sensitive
mass block of each of the upper half part and the
lower half part is provided with a first hollowed-out area anda second hollowed-out area; a supporting beam
anchor point, a supporting beam, a detection comb tooth unit
anchor point and a detection comb tooth unit are mounted in each first hollowed-out area; a supporting beam anchor point, a supporting beam, a force feedback comb tooth unit, a force feedback comb tooth unit anchor point, a rigidity compensation unit and a rigidity compensation unit anchor point are mounted in each second hollowed-out area; and by the design of a rigidity compensation structure of the accelerometer, the problem of large mechanical rigidity due to
processing of a technology can be solved.