MEMS closed-loop accelerometer based on rigidity compensation

Abstract

The invention discloses a MEMS closed-loop accelerometer based on rigidity compensation. The MEMS closed-loop accelerometer based on rigidity compensation comprises an upper half part and a lower halfpart which are centrosymmetric along the accelerometer, each of the upper half part and the lower half part comprises a substrate, an anchor point is fixed on each substrate, an insulating layer is arranged on each substrate, each insulating layer is provided with a sensitive device layer, and each sensitive device layer comprises a sensitive mass block, a supporting beam, a force feedback comb tooth unit, a detection comb tooth unit and a rigidity compensation unit; the sensitive mass block of each of the upper half part and the lower half part is provided with a first hollowed-out area anda second hollowed-out area; a supporting beam anchor point, a supporting beam, a detection comb tooth unit anchor point and a detection comb tooth unit are mounted in each first hollowed-out area; a supporting beam anchor point, a supporting beam, a force feedback comb tooth unit, a force feedback comb tooth unit anchor point, a rigidity compensation unit and a rigidity compensation unit anchor point are mounted in each second hollowed-out area; and by the design of a rigidity compensation structure of the accelerometer, the problem of large mechanical rigidity due to processing of a technology can be solved.

Description

technical field [0001] The invention relates to the field of micromechanical MEMS accelerometers, in particular to a MEMS closed-loop accelerometer based on stiffness compensation. Background technique [0002] Micromechanical MEMS accelerometer is a device or device for measuring acceleration, which has a wide range of application requirements in high-precision fields such as industrial control, aviation, aerospace, and military. However, due to poor consistency and processing errors in the production process of MEMS accelerometers, the mechanical structure stiffness of the produced accelerometer may be larger than the theoretical design value, resulting in reduced sensitivity of the accelerometer, increased noise, and poor resolution. Rate variation, etc., which will seriously hinder its application in the field of high precision. Therefore, strategies need to be adopted to compensate for the influence of excessive mechanical stiffness caused by process errors. Contents...

AI Technical Summary

Problems solved by technology

However, due to poor consistency and processing errors in the production process of MEMS accelerometers, the mechanical structure stiffness of the produced accelerometer may be larger than the theoretical design value, resulting in reduced sensitivity of the accelerometer, increased noise, and poor resolution. Rate variation, etc., which will seriously hinder its application in the field of high precision

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