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Sensing unit based on ceramic co-firing process, electrochemical gas sensor comprising sensing unit and manufacturing method of sensing unit

A technology for sensing units and manufacturing methods, applied in the direction of material electrochemical variables, etc., can solve problems such as difficult methods, complex structures, and large volumes of electrochemical gas sensors

Inactive Publication Date: 2019-04-02
NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problems that the conventional method for manufacturing electrochemical gas sensors is difficult, and the manufactured electrochemical gas sensors have complex structures and large volumes. Now, a sensor unit based on a ceramic co-firing process, and a sensor unit containing the sensor unit are provided. Electrochemical gas sensor and method for manufacturing sensor unit

Method used

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  • Sensing unit based on ceramic co-firing process, electrochemical gas sensor comprising sensing unit and manufacturing method of sensing unit
  • Sensing unit based on ceramic co-firing process, electrochemical gas sensor comprising sensing unit and manufacturing method of sensing unit

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specific Embodiment approach 1

[0034] Specific implementation mode one: refer to figure 1 This embodiment is described in detail. The sensor unit based on the ceramic co-firing process described in this embodiment includes: a working electrode layer 1, an electrolytic cell layer 2, an auxiliary electrode layer 3 and an extraction layer 4,

[0035] The ceramic substrate of the working electrode layer 1 has a first through hole 1-3, a first electrolytic cell through hole 1-4, a second through hole 1-5 and a first through hole 1-6, and the first electrolytic cell through hole The upper opening of 1-4 is closed and covered with a catalytic electrode 1-2, and the upper surface of the catalytic electrode 1-2 is covered with a gas-permeable membrane 1-1 in a closed manner, and the material of the catalytic electrode 1-2 is noble metal, metal oxide or metal complexes;

[0036] The ceramic substrate of the electrolytic cell layer 2 is provided with a second electrolytic cell through hole 2-1, a third through hole 2...

specific Embodiment approach 2

[0046] Specific implementation mode two: refer to figure 2 Specifically explaining this embodiment, the electrochemical gas sensor including the sensing unit described in Embodiment 1 in this embodiment includes a plurality of sensing units based on a ceramic co-firing process arranged in a rectangular array.

[0047] In this embodiment, each sensing unit realizes the preparation of various gas sensors by immobilizing different types of electrolytes and printing catalytic electrodes of different types of catalytic electrode materials.

specific Embodiment approach 3

[0048] Embodiment 3: This embodiment is a method for manufacturing the sensing unit described in Embodiment 1, which includes the following steps:

[0049] Step 1: Prepare the first through hole 1-3, the first electrolytic cell through hole 1-4, the second through hole 1-5 and the first through hole 1- 6. Prepare the second electrolytic cell through hole 2-1, the third through hole 2-2, the fourth through hole 2-3 and the second through hole 2-4 on the ceramic substrate of the electrolytic cell layer 2, and the auxiliary electrode layer 3 preparing a third via hole 3-2, a fourth via hole 3-3 and a fifth via hole 3-5 on the ceramic substrate;

[0050] Use the screen printing method to print conductive wires in the first via hole 1-6, the second via hole 2-4, the third via hole 3-2, the fourth via hole 3-3 and the fifth via hole 3-5. Metal;

[0051] Utilize screen printing to print lead wires on the ceramic substrate upper surface of the working electrode layer 1 respectively,...

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Abstract

The invention discloses a sensing unit based on a ceramic co-firing process, an electrochemical gas sensor comprising the sensing unit and a manufacturing method of the sensing unit, relates to the field of electrochemical gas sensors, and is used for solving the problem that a conventional method for manufacturing an electrochemical gas sensor is difficult. A sensing unit based on the ceramic co-firing process comprises a working electrode layer, an electrolytic cell layer, an auxiliary electrode layer and an extraction layer which are sequentially stacked from top to bottom. A first electrolytic cell through hole and a second electrolytic cell through hole constitute an electrolytic cell cavity. A catalytic electrode is electrically connected to a conductive metal of the first through hole. A counter electrode is electrically connected to the conductive metal of a third through hole. The conductive metal of the first through hole, the second through hole and a fourth through hole areelectrically connected. A first leading-out terminal is electrically connected to the conductive metal of the fourth through hole. The second leading-out terminal is electrically connected to the conductive metal of the third through hole. According to the sensing unit based on the ceramic co-firing process, the electrochemical gas sensor comprising the sensing unit, and the manufacturing methodof the sensing unit, different kinds of gas detection are realized by injecting different types of electrolytes, different catalytic electrode materials.

Description

technical field [0001] The invention belongs to the technical field of electrochemical gas sensors. Background technique [0002] Electrochemical gas sensors are widely used in gas concentration detection in industrial environments, air quality, and closed environments because of their advantages such as low power consumption and stable output. CITY Company of the United Kingdom, FIGARO Company of Japan, and RAE Company of the United States are world-renowned electrochemical gas sensors. Gas sensor manufacturer, whose products cover the detection of dozens of gas concentrations, almost occupying the entire market in the world's electrochemical gas sensor field. [0003] At present, electrochemical gas sensors are all manufactured by traditional techniques, and there are problems of difficult manufacturing methods, complex structures, and large volumes. It is difficult to realize the miniaturization and integrated design and manufacture of electrochemical sensors, which limit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/26
CPCG01N27/26
Inventor 杨永超秦浩王洋洋程振乾刘玺刘继江
Owner NO 49 INST CHINESE ELECTRONICS SCI & TECH GRP
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