The invention provides a characteristic
analysis method for a capacitive micromachined ultrasonic
transducer (CMUT), which aims at performing effective analysis on displacement, acceleration,
sound pressure characteristics and receiving characteristics under the circumstances of different emission signals. The characteristic
analysis method for the CMUT comprises the step: firstly establishing an infinitesimal state equation SIMULINK model of the CMUT in an emission state and an infinitesimal state equation SIMULINK model of the CMUT in a receiving state, wherein the infinitesimal state equation SIMULINK model of the CMUT in the emission state comprises a CMUT vibration
system module and an electrostatic force module, and the infinitesimal state equation SIMULINK model of the CMUT in the receiving state comprises a CMUT vibration
system module, an electrostatic force module and a current output module; the electrostatic force module calculates an electrostatic force Fe by determining parameters, such as driving
voltage V, an initial gap g0 between an upper
electrode and a lower
electrode, and displacement; by determining parameters, such as the electrostatic force Fe, equivalent
mass, equivalent spring constant K and equivalent impedance R, the CMUT vibration
system module establishes a lumped parameter system, calculates vibration displacement and
vibration velocity, and outputs the displacement as feedback quantity to the electrostatic force module, thereby multiplying
vibration velocity and
radiation resistance to calculate sound
radiation pressure.