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435results about How to "Avoid dilution" patented technology

Face mask for gas monitoring during supplemental oxygen delivery

A face mask including a gas monitoring capability for improved patient management in combination with improved efficiency of supplemental oxygen delivery to the patient is provided. The face mask of the present invention is configured to direct substantially all of the inspiratory and expiratory gas streams to and from the patient through a gas measuring device and to efficiently deliver supplemental oxygen. As such, the face mask permits measurement of both oral and nasal gas exchange.
Owner:PHILIPS RS NORTH AMERICA LLC

Hash table operations with improved cache utilization

Method and apparatus for building large memory-resident hash tables on general purpose processors. The hash table is broken into bands that are small enough to fit within the processor cache. A log is associated with each band and updates to the hash table are written to the appropriate memory-resident log rather than being directly applied to the hash table. When a log is sufficiently full, updates from the log are applied to the hash table insuring good cache reuse by virtue of false sharing of cache lines. Despite the increased overhead in writing and reading the logs, overall performance is improved due to improved cache line reuse.
Owner:CERTEON

Quantitative detection device based on fibrous-membrane gathering and separation and detection method thereof

ActiveCN103323590AEfficient separationAvoid repeated washing operationsMaterial analysisFiberBuffer solution
The invention relates to a quantitative detection device based on fibrous-membrane gathering and separation and a detection method thereof. The quantitative detection device comprises a separation testing cup, a reaction cup, an analysis buffer solution and a cleaning solution; wherein the separation testing cup comprises a receiving tank, a water absorption cup and millipore filters between them. A capture agent and a labeling agent are solidified on the bottom of the reaction cup and the capture agent is fixed on the surface of latex beads. The detection method comprises: conjugation reaction, separation, cleaning and detection. In the invention, not only the characteristics of convenient operation and rapid detection of immune infiltration (IF) and immunochromatography (IC) are maintained, but also precision and sensitivity of the detection are obviously better than that of IF and IC. Therefore, quantitative immunodetection and nucleic acid hybridization analysis can be implemented effectively. The invention can be used for the quantitative detection of substances such as protein, nucleic acid, small molecule and microbe.
Owner:SHANGHAI YUNZE BIOTECH +1

Weld Overlay Structure and a Method of Providing a Weld Overlay Structure

A method of providing a weld overlay structure on a heat transfer tube or a membrane surface. A first continuous bead portion of an overlay material is applied onto the heat transfer tube or membrane surface by using a weld head to melt the overlay material. A second continuous bead portion of the overlay material is applied onto the heat transfer tube or membrane surface by using a weld head to melt the overlay material, in which the second bead portion partially overlaps with the first bead portion, forming a groove between the first bead portion and the second bead portion. A third continuous bead portion of an overlay material is applied onto the heat transfer tube or membrane surface by using a weld head to melt the overlay material into the groove between the first bead portion and the second bead portion, so as to form a relatively smooth surface.
Owner:POURIN WELDING ENG +1

Oil dilution inhibiting apparatus and method

An oil dilution inhibiting apparatus is mounted on a vehicle provided with an engine in which alcohol fuel can be used, the oil dilution inhibiting apparatus provided with: an intake amount integrating device for integrating amount of an air sucked into the engine while the engine is in operation, thereby calculating an integrated intake amount; a temperature detecting device for detecting oil temperature of engine oil of the engine; and a controlling device for controlling the vehicle to move into an oil heating mode in which the oil temperature is increased in such conditions that the calculated integrated intake amount is greater than an integrated intake amount threshold value and that the detected oil temperature is less than a first temperature threshold value.
Owner:TOYOTA JIDOSHA KK

Control device and method for a diesel engine and diesel engine

InactiveUS6782696B2Extend rangeEgr ratio be increaseElectrical controlInternal combustion piston enginesNormal valuesDiesel engine
A low NO.sub.x combustion mode is executed in which the fuel injected timing IT is greatly advanced to 36.degree. BTDC as compared with a normal value of roughly 10.degree. BTDC. At this fuel injection timing IT, the smoke emission amount is suppressed below an extremely low value, even if the EGR ratio Regr is increased to about 56%, and the NO.sub.x emission amount is suppressed owing to a large amount of EGR, so that the smoke and NO.sub.x can be reduced at the same time.
Owner:MITSUBISHI MOTORS CORP

Exhaust gas purification apparatus for engine

An exhaust gas purification apparatus is provided with: a first soot-accumulation calculation unit 49 which calculates a first soot accumulation amount from an operation state of the engine; a second soot-accumulation calculation unit 51 which calculates a second soot accumulation amount from a total operation time of the engine, a total fuel consumption rate, a pressure difference between front and back of the particulate filter, and the like; a first soot-accumulation correction unit 55 which corrects the first soot accumulation amount calculated by the first soot-accumulation calculation unit 49 to a value greater than the first soot-accumulation amount when the active regeneration starts based on the second soot accumulation amount calculated by the second soot-accumulation calculation unit 51; and a regeneration ending unit 57 which ends the active regeneration when, in such a case that the active regeneration starts based on the corrected soot accumulation amount, the first soot accumulation amount becomes less than a threshold value of ending the regeneration.
Owner:MITSUBISHI HEAVY IND ENGINE & TURBOCHARGER LTD

Exhaust gas purifying system

An exhaust emission control system including a continuous regenerating diesel particulate filter (“DPF”) and a DPF controller, wherein a forced regenerator is operated by a driver's request, when it is judged that a traveling distance, after starting particulate matter collection, detected by a traveling distance detector has reached a predetermined judging traveling distance, even when the DPF controller detects that a collection amount detected by a collection amount detector is smaller than a prescribed judging collection amount. Accordingly, in a continuous regenerating DPF capable of manual regenerating, the number of warnings, such as a blinking regeneration button prompting a manual regeneration, is reduced to relieve a driver of annoyance or inconvenience.
Owner:ISUZU MOTORS LTD

Stable gas membrane and method used for removing, recovering, and gathering ammonia or organic amine from dosage liquor or wastewater

The invention relates to a stable gas membrane used for removing, recovering, and gathering ammonia or organic amine from dosage liquor or wastewater. The gas membrane comprises a membrane shell, hollow fibrous membranes (A) and hollow fibrous membranes (B). A cavity is provided in the middle of the membrane shell. An inlet and an outlet are respectively arranged on each of the two ends of the membrane shell. The hollow fibrous membranes (A) and the hollow fibrous membranes (B) are positioned in the cavity of the membrane shell. A shell pass outlet communicating with the atmosphere is arranged on a lower end of the membrane shell. The hollow fibrous membranes (A) and the hollow fibrous membranes (B) are uniformly arranged in the membrane shell with regular spaces. Dosage liquor or wastewater containing ammonia or organic amine is delivered through the tube pass of the hollow fibrous membranes (A), and absorption liquid is delivered through the tube pass of the hollow fibrous membranes(B). With the gas membrane provided by the invention, problems of traditional gas membranes of leakage and low service life are overcome; dilution of a byproduct ammonium salt solution caused by a concomitant osmotic distillation phenomenon can be effectively inhibited; ammonium salt concentration of the byproduct ammonium salt solution can be increased from 10-20% to 20-40%; mass transfer coefficient at the acid absorption liquid side can be substantially improved; the ammonia removing efficiency is high; the ammonia removing effect is stable for a long-term; and the service life of membranesets can be improved by 3-10 times than common gas membranes.
Owner:天津凯铂能膜工程技术有限公司

Gene-ordrug-carrying-carrying ultrasonic microvesicle contrast-media and preparing method thereof

This invention discloses an ultrasonic microbubble contrast agent of carrier gene, it includes microbubble, fluorocarbon gas, gene or medicine. Microbubble wall is made up by lipid bielement, fluorocarbon gas is encapsulated in it, gene or medicine entrapped in microbubble envelope. This invention also discloses its preparation method, two stearyl phosphatidylcholine, two palmitoyl phosphatidyl ethanolamine, sapn-60, glycerol, phosphate buffer solution and gene or medicine is mixed as proper proportion for mechanical oscillations. The property of carry gene or medicine microbubble is stable, particle diameter disperses equally, local tissue medicine concentration can be obviously advanced though effect of transonic breaking microbubble, and curative effect is advanced and side effect can be reduced. Flushing and dilution of blood to gene and medicine can be prevented when used in body, and also prevent gene or medicine from degrading by nuclease in cycle to ensure that lot of gene and medicine can be transported to target tissue. And it is linear increase follow gene or medicine input amount in certain range.
Owner:CHONGQING MEDICAL UNIVERSITY

Methods for ex vivo propagation of somatic hair follicle stem cells

ActiveUS20050272147A1Enhance guanine nucleotide biosynthesisSuppressing asymmetric cell kineticsBiocideEpidermal cells/skin cellsCell kineticsSomatic cell
The present invention is directed to methods for readily propagating somatic hair follicle stem cells or melanocyte stem cells. The methods comprise enhancing guanine nucleotide (GNP) biosynthesis, thereby expanding guanine nucleotide pools. This in turn conditionally suppresses asymmetric cell kinetics in the explanted cells. The methods of the invention include pharmacological methods and genetic methods. For example, the resulting cultured somatic hair follicle stem cells can be used for a variety of applications including cell replacement therapies such as hair transplants, gene therapies, and tissue engineering applications, such as the generation of artificial skin and skin regeneration strategies including skin grafts.
Owner:MASSACHUSETTS INST OF TECH

Exhaust Gas Purifying System

An exhaust emission control system [1] comprising a continuous regenerating DPF [13] and a DPF controlling means [30C], wherein control is so performed as to accept the operation of a forced regenerating means [34C] at an operation request by a driver when it is judged a traveling distance [ΔMc] after starting collection detected by a traveling distance detecting means [33C] has reached a specified judging traveling distance [ΔM1] even when the DPF controlling means [30C] detects a collection amount [ΔPm] detected by a collection amount detecting means [32C] is smaller than a specified judging collection amount [ΔP1]. Accordingly, in a continuous regenerating DPF [13] capable of manual regenerating, the number of warning such as a blinking regeneration button prompting a manual regeneration is reduced to relieve a driver of trouble.
Owner:ISUZU MOTORS LTD

Diesel engine

Provided is a diesel engine which can efficiently regenerate a diesel particulate filter. The control for regeneration using an ECU includes a first regeneration by burning particulate matter at slightly more than 300° C. for 20 minutes when the accumulation of particulate matter exceeds a first threshold; a second regeneration by burning particulate matter at approximately 560° C. for 30 minutes by an additional injection to remove particulate matter other than ash when the accumulation of particulate matter exceeds the first threshold for a first predetermined period of time, or every 100 hours; and a third regeneration by burning particulate matter at approximately 600° C. for 15 minutes by an additional injection to remove particulate matter other than ash when the accumulation of particulate matter exceeds a second threshold and an emergency regeneration switch is pushed, or after 50 hours since the second or third regeneration and the emergency regeneration switch is pushed.
Owner:YANMAR POWER TECHNOLOGY CO LTD

Air conditioner and refrigerant control system and method thereof

The invention discloses a refrigerant control system and a method. The refrigerant control system comprises an acquisition device, a calculating device and an electronic expansion valve, wherein the acquisition device is used for acquiring discharge temperature, suction temperature, high-pressured pressure and low-pressured pressure; the calculating device is used for calculating discharge superheat, target suction superheat and actual suction superheat, judging whether the actual suction superheat is higher than the target suction superheat or not, and sending a judgment result to the electronic expansion valve; the electronic expansion valve is used for increasing refrigerant flux when the actual suction superheat is higher than the target suction superheat, and reducing the refrigerant flux when the actual suction superheat is lower than the target suction superheat. According to the refrigerant control system provided by the invention, the acquisition and the calculation of the temperature and the pressure are utilized, so that the refrigerant volume flowing into a compressor can be ensured to be within a controlled range, and engine oil of the compressor can be prevented from being diluted by more refrigerant, and the safe and stable operation of the system is ensured. The invention also discloses an air conditioner comprising the refrigerant control system.
Owner:SHENZHEN MCQUAY AIR CONDITIONING

Portable underground water fixed-depth sampling device, sampling system and sampling method

The invention discloses a portable underground water fixed-depth sampling device, a sampling system and a sampling method, and belongs to the field of site pollution investigation and risk assessment.A moving blocking air bag is arranged; stagnant water at the upper end and the lower end of an underground water sampling probe in a well pipe is effectively blocked, an underground water sample at the depth where the sampling probe is located can be accurately collected, the problem that in the well washing sampling process of a traditional method, upper-layer water samples and lower-layer watersamples in the well pipe are mixed, and consequently sample dilution is caused is solved, and the concentration detection accuracy is improved. Underground water samples of different depths can be accurately collected in the same monitoring well, fixed-depth sampling is achieved, and the cost is obviously reduced. In addition, the stagnant water on the upper layer and the lower layer of the underground water sampling probe in the well pipe is effectively blocked, the well washing volume before sampling can be reduced, the sampling time is saved, the sampling efficiency is improved, the well washing wastewater generation amount is reduced, the sampling cost is further reduced, disturbance to underground water in the well pipe can be reduced, and the accuracy of detected concentration is guaranteed.
Owner:BEIJING MUNICIPAL RES INST OF ENVIRONMENT PROTECTION

Accumulator fuel injection system

In a common rail system comprised of a first accumulator storing high-pressure fuel and a second accumulator storing low-pressure fuel, additional fuel is injected when a fuel pressure in a fuel passage or in the second accumulator (low inlet pressure of an injector) is reduced to a low pressure approximate to the pressure of the low-pressure fuel stored in the second accumulator after a switching valve is operated for disconnection from the fuel passage (switching valve drive signal OFF) at a point in time when a main injection control device finishes the injection of fuel (injector drive signal OFF) or after the main injection control device finishes the injection of fuel. This keeps the fuel pressure as low as possible during post injection to prevent the fuel from adhering to the wall surfaces of cylinder liners.
Owner:MITSUBISHI FUSO TRUCK AND BUS CORPORATION

Rapamycin-resistant T cells and therapeutic uses thereof

InactiveUS20060159667A1Decrease number of tumorMaintaining tumor sizeOrganic active ingredientsBiocideDrugImmune Cell Function
Methods for generating highly enriched Th1 / Tcl and Th2 / Tc2 functions are described. In particular, the generation of these functions are attained by the addition of an immune suppression drug, rapamycin or a rapamycin derivative compound. In addition to enhanced purity of T cell function, the T cells generated in rapamycin also express molecules that improve immune T cell function such as CD28 and CD62L. Such rapamycin generated functional T cell subsets may have application in the prevention or treatment of GVHD after allogeneic hematopoietic stem cell transplantation, the treatment of autoimmunity, or the therapy of infection or cancer.
Owner:US DEPT OF HEALTH & HUMAN SERVICES +1

Fuel injection timing control apparatus and control method thereof for in-cylinder injection gasoline engine

A fuel injection mode is flexibly controlled according to the actual extent of adverse effects on an internal combustion engine from both deterioration of exhaust gas emissions and fuel dilution caused by fuel adhering to the piston top face and the cylinder inner peripheral face. A dilution degree counter value C is counted up when a coolant temperature at engine startup THWST and an intake air quantity sum value after engine startup GASUM are each equal to, or less than, respective predetermined values. A fuel dilution flag is set to "ON" when the dilution degree counter value C is equal to, or greater than, a predetermined value CH. A fuel injection timing of an intake stroke injection is changed to a timing on the advance side when this fuel dilution flag is "ON."
Owner:TOYOTA JIDOSHA KK

Liquid chromatographic sampling passage cleaning device

The invention provides a liquid chromatographic sampling passage cleaning device. The liquid chromatographic sampling passage cleaning device mainly comprises a microfluidic pump, a compressed air source, a capillary flow limiter, a liquid-gas switching valve, a sampling-cleaning switching valve, a waste liquid collecting cup, a waste liquid bottle, a sampling valve, a sampling port and a program controller. After sampling, a cleaning solution is used for reversely rinsing a liquid chromatographic sampling passage to reversely rinse particles left on a filter in the sampling process and discharge the particles out of a sampling pipeline first and then microflow gas is used for reversely purging the sampling passage to expel liquid left inside the pipeline so as to avoid sample dilution during sampling once again. The liquid chromatographic sampling passage cleaning device is suitable for various analytical-grade liquid chromatographs, comprising positive chromatography, reverse chromatography, ion chromatography and the like, as well as suitable for cleaning a sampling loop for flow injection analysis, so that cross pollution of samples is avoided, the sampling repeating precision is improved, and the service life of the sampling filter can be greatly prolonged.
Owner:DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI

Compression system with second vapor injection function, air conditioning system and judgment and control method of compression system

ActiveCN105371514AJudging whether there is liquid in the supplementary airAvoid dilutionMechanical apparatusCompression machines with non-reversible cycleEngineeringAir conditioning
The invention provides a compression system with a second vapor injection function. The compression system comprises a compressor (1), a second vapor injection pipeline (2) and a gulp valve (3) arranged on the second vapor injection pipeline (2), wherein according to the flow direction of a refrigerant, a first pressure detection device (4) and a first temperature detection device (5) are arranged at the inlet end of the gulp valve (3) on the second vapor injection pipeline (2); a second temperature detection device (6) is arranged at the outlet end; and the system further comprises a second pressure detection device (7) and a third temperature detection device (8) arranged on an exhaust pipeline (11) of the compressor (1). According to the invention, whether the second vapor injection of the compressor carries liquid or not and the situations that the vapor injection carries a small amount of liquid and the vapor injection carries a large amount of liquid can be accurately judged, so that the situations that the lubricating oil in the compressor is diluted, the compressor is abrased, and even liquid impact occurs due to the fact that the second vapor injection carries liquid are avoided. The invention further relates to an air conditioning system with the compression system and a judgment and control method.
Owner:GREE ELECTRIC APPLIANCES INC

Lateral flow test strip detection kit for detection of bovine-derived components in foods and feeds and application of kit

The invention discloses a preparation method and an application method of a nucleic acid rapid detection kit for Bostaurus components in feeds and belongs to the field of molecular biology and immunology. According to the preparation method and the application method, a high-sensitivity and high-specificity method of a polymerase chain reaction in nucleic acid detection is combined with an immuno gold staining rapid detection technology in immunology detection; a unique primer is designed and the primer is labeled; an extracted target DNA is subjected to specific amplification and an amplified product is combined with a labeled antibody immobilized on a test strip in a developing solution to form a stable and visible detection strip and a quality control strip, so as to realize rapid and accurate detection on the bovine-derived components in food and feed.
Owner:ANIMAL & PLANT & FOOD INSPECTION CENT OF TIANJIN ENTRY EXIT INSPECTION & QUARANTINE BUREAU

Electrolysis device for preparation of hypochlorous water

An electrolysis device for preparation of hypochlorous water is provided, comprising an electrolytic cell, and cathodic and anodic electrolytic sheets arranged in the electrolytic cell, wherein the electrolytic cell is separated to form an inner tank for containing hydrochloric acid and an outer tank for circulating tap water, a central portion of the inner tank is sealed and separated relative to the outer tank, and a chlorine discharge outlet connected to the outer tank is provided at the upper end of the inner tank; the cathodic and anodic electrolytic sheets are located on both sides of the inner tank. The electrolysis device without a membrane utilizes tap water and hydrochloric acid as raw materials, having an inner tank for containing hydrochloric acid and an outer tank for circulating tap water. Chlorine generated through electrolysis of hydrochloric acid is discharged from the chlorine discharge outlet and combined with tap water in the outer tank to generate hypochlorous acid. This electrolysis device has simple structure, and can effectively improve productivity of hypochlorous water. Hypochlorous water produced by this electrolysis device has functions of sterilization and environmental protection.
Owner:KUAN YU WEN +1

Side direction current test strip detection kit for detecting canis familiaris component in feed and application thereof

The invention discloses a preparation method of a rapid nucleic acid detection kit for detecting canis familiaris components in feed and an application method thereof, and belongs to the fields of molecular biology and immunology. According to the invention, a high sensitivity and high specificity method of polymerase chain reaction in nucleic acid detection and an immuno gold staining rapid detection technology in an immunological detection are combined, a specific primer is designed and labeled, the extracted target DNA is subjected to specific amplification, and amplified product is combined with a gold labeled antibody immobilized on a test paper tape, so as to form a stable and visible detection band and quality control band, thereby achieving the rapid and correct detection of the canis familiaris components in the main feed.
Owner:ANIMAL & PLANT & FOOD INSPECTION CENT OF TIANJIN ENTRY EXIT INSPECTION & QUARANTINE BUREAU

Ultrasonic atomizing fire extinguisher

The invention relates to an ultrasonic atomization fire extinguisher, which comprises a power supply unit, a water level adjusting unit and an ultrasonic atomization unit, which is characterized in that a circulating fan that is arranged in an atomization cavity and forms internal circulating airflow of the atomization cavity and an overflow port of gas phase and water phase is a water mist outlet of the atomization cavity. A ventilation unit of the invention realizes the circulation flow of air in an atomizer, thus preventing outside air from diluting the water mist, greatly prompting the dripping mass fraction of the water mist and causing ultrasonic atomization to be applied in fire fighting.
Owner:UNIV OF SCI & TECH OF CHINA

Resin emulsion plugging agent composition, preparation method thereof and application of composition in fractured stratum

The invention relates to the field of drilling fluid plugging and discloses a resin emulsion plugging agent composition, a preparation method thereof and application of the composition in a fracturedstratum. The composition comprises a water-based resin emulsion, a curing agent, a coupling agent and nano lithium bentonite, wherein with the total weight of the composition as a standard, the content of the water-based resin emulsion is 90.5-95.8 wt%, the content of the curing agent is 3-7 wt%, the content of the coupling agent is 0.2-0.5 wt%, and the content of the nano lithium bentonite is 1-3wt%. The resin emulsion plugging agent prepared by the method has uniform and stable dispersion performance, is solidified under a high-temperature condition after being injected into a crack, and forms a solidified body with high strength and toughness, wherein the cementation strength between the solidified body and the wall surface of rock is high. The composition is particularly suitable fora leaking stratum with multi-scale cracks which are formed together.
Owner:CHINA UNIV OF PETROLEUM (EAST CHINA)

Specimen observation, collection, storage and preservation devices and methods of use

The devices and methods taught in this disclosure are directed to facilitate the observation, collection, transportation, storage, and preservation of specimens possibly containing DNA, said specimens potentially constituting evidence of sexual assault. The devices and methods described further allow for a means of minimizing the possibility of specimen contamination, dilution, or degradation during the collection and storage processes. The disclosed devices may contain electrical components that provide for the generation and recordation of information (specifically, times, dates, and locations) related to circumstances surrounding the collection of such specimens. This information may serve as evidence corroborating the circumstance of specimen collection, it may help to maintain a known and identifiable Chain of Custody (CoC), and it may additionally be used for unique device identification (UDI), inventory control, and current procedural terminology (CPT) coding purposes.
Owner:MY ECO HEALTH

Leak inspection device

In an inspection device in which a leakage of He gas from a product 1 is detected when He gas is pressurized and charged into the product 1 accommodated in a vacuum chamber 2, a variable displacement means, capable of changing the volume of the vacuum chamber corresponding to a size of the product 1, is provided in the vacuum chamber. An example of the variable displacement means is a variable displacement piston 8 which is arranged in the vacuum chamber and moves along wall faces of the vacuum chamber. A plurality of variable displacement pistons may be provided.
Owner:DENSO CORP

Special micro-flow control chip and single sampling continuous separation electrophoresis method

The present invention discloses a special microfluidic chip and a single-sampling continuous-separating electrophoresis method. The invention is applied in the technique field of the microfluidic chip in life science, medicine and analytical chemistry. The invention is characterized in that the invention comprises a method for exerting the electrophoresis high tension electricity parameter and a microfluidic chip which is used together with the method. The shunting driving voltage which is exerted to the microfluidic chip through an electrophoresis special high voltage power source leads to that the redundant buffer solution and sample solution totally flow into the shunting solution storage tank through a shunting channel. The side wall of the sampling channel on the special microfluidicchip is added with a shunting channel which forms a crossing structure with the former sampling channel and a shunting solution storage tank communicating with the shunting channel. The beneficial effects of the invention is effective prevention to the leakage of the buffer solution, avoidance to the dilution of the sample solution, evident reinforcement to the repeatability of a plurality of peak heights of the sample in the continuous-separation electrophoresis pattern and increased accuracy of the analyzing result of the continuous-electrophoresis separation experiment.
Owner:DALIAN UNIV OF TECH

Substrate processing apparatus

A substrate processing apparatus includes a substrate holder, a rotating mechanism, a processing liquid discharge unit, and a gas discharge unit. The processing liquid discharge unit discharges a liquid flow of a processing liquid such that the liquid flow comes into contact with a landing position in a rotation path of a peripheral portion of an upper surface of the substrate being rotated. The gas discharge unit discharges a first gas flow of an inert gas from above toward a first position upstream from the landing position in a direction of rotation of the substrate in the rotation path, and discharges a second gas flow of the inert gas from above toward a second position upstream from the first position in the direction of rotation of the substrate in the rotation path. The kinetic energy of the second gas flow is lower than the kinetic energy of the first gas flow.
Owner:DAINIPPON SCREEN MTG CO LTD
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