The invention discloses a method for predicting a
negative bias temperature instability (NBTI) service life of a pMOSFET (P-channel
Metal Oxide Semiconductor Field Effect Transistor) device. The method comprises the following steps of: S1, before applying
negative bias stress, measuring initial characteristics of the pMOSFET device to obtain initial parameters of the device; S2, applying a stress condition to a grid of the device, wherein drain
voltage is normal working
voltage; performing stress
aging test to the device within a pre-set time interval; S3, testing the parameters of the device to obtain
device parameters related to the aging time until the total
stress time is ended; S4, when the drain
voltage is the normal working voltage, repeating the steps S2 and S3; testing different
stress conditions; referencing to the
device parameters retrograded to a critical point; obtaining failure times of the pMOSFET device under the relative
stress conditions; and S5, using the failure times of the pMOSFET device under the different
stress conditions, predicting the reliability service life of the device when the
gate voltage is the normal working voltage. Because the failure time of the device obtained by the method in the invention is shorter than that obtained by the conventional method, the NBTI service life of the pMOSFET device can be well reflected.