34results about How to "Suppresses generation of dust" patented technology

A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. The useful life of each plane mirror can be prolonged without displacing the optical axis itself by overcoming the problem that when the laser beam is employed as the light source and a thin beam with a high illumination density is illuminated to the same position on each of the first and second plane mirrors for a long time, the surface of the plane mirror is deteriorated, the reflectance is reduced, and the light quantity cannot be held at a required level.

A metal oxide film suitable for protection of metals, composed mainly of aluminum. A metal oxide film includes a film of an oxide of a metal composed mainly of aluminum, having a thickness of 10 nm or greater, and exhibiting a moisture release rate from the film of 1E18 mol./cm² or less. Further, there is provided a process for producing a metal oxide film, wherein a metal composed mainly of aluminum is subjected to anodic oxidation in a chemical solution of 4 to 10 pH value so as to obtain a metal oxide film.

A large-size substrate adapted for light exposure is of a plate shape having a diagonal length or diameter of 500-2,000 mm, a thickness of 1-20 mm, and a peripheral surface with a roughness Ra of 0.05-0.4 μm. The number of particles released from the substrate periphery during cleaning is minimized, leading to an improved yield in the cleaning step. The substrate can be manually handled, achieving an improvement in substrate quality without a need for a handling mechanism.

A LCD device includes a LC panel unit including TFT and counter substrates, and a backlight unit on which the LC panel unit is mounted. The backlight unit has a plurality of positioning ribs protruding from the backlight unit in the vicinity of the corners of the display panel for positioning the display panel. Some of the positioning ribs have a first positioning wall having a height larger than the height of the boundary between the TFT substrate and the counter substrate in a first display area in which the edge of the TFT substrate protrudes from the edge of the counter substrate. Others of the positioning ribs have a second positioning wall having a height lower than the height of the boundary between the TFT substrate and the counter substrate in a second display area in which the edge of the TFT substrate is flush with the edge of the counter substrate.

Disclosed is an aggregate recycling apparatus having an air circulation type foreign substance and fine particle separation means which directs a blast of air, circulated in a dry state, toward waste having passed through a crushing process immediately after the crushing of the waste and removes fine particles and foreign substances using a cyclone, thereby removing dust generated in the course of separating and screening the waste, and a method thereof. The aggregate recycling apparatus includes a crushing device for crushing waste, an air circulation type fine particle and foreign substance separation device for directing re-circulated air to crushed products received from the crushing device, scattering fine particles and foreign substances and collecting dust in a cyclone, an air conveyor for conveying crushed products deprived of the fine particles and foreign substances, and a double vibration screen for screening the crushed products received from the air conveyor.

The present invention is to provide a plasma processing apparatus, whose structure can be simplified, and further, which is capable of forming highly effective plasma and obtaining a satisfactory vertical etching property without involving a problem concerning interference. In the plasma processing apparatus according to the invention, a ground electrode provided at a position opposite to a substrate mounting electrode is configured to be a counter electrode, whose potential is in a floating state, and radio frequency power is branched at an arbitrary position of the radio frequency antenna coil, which generates inductive discharge, into the counter electrode through a capacitor so as to share a part of the radio frequency power used for inductive discharge, thereby generating a self-bias in the counter electrode. In the system, there is provided a mechanism for controlling the radio frequency voltage to be applied to the floating electrode uniformly.

The present invention is aimed to reduce a possibility that clean space at the so-called door being opened in the FIMS system is polluted. In order to achieve the object concerned, as a driving mechanism for driving a load port door in the FIMS system, mechanisms different in driving speed are used between during the early stage of driving and any other state than it. Particularly, during the early stage of driving, it is made possible to drive the door at exceedingly low speed, and after the door is opened by a predetermined amount, the door will be driven at high speed that has been usually controlled.

A transfer apparatus capable of suppressing dust generation and reducing the manufacturing cost thereof is provided.

In a transfer apparatus including a transfer unit which moves on a rail to transfer an object and an arm mechanism which transmits the power from a drive source to the transfer unit, the arm mechanism includes a rotatable driving arm with one end thereof connected to the drive source, a driven arm with one end thereof connected to the transfer unit, and a gear mechanism which connects the other end of the driven arm to the other end of the driving arm and transmits the rotation of the driving arm to the driven arm.

To prevent foreign matters from adhering to a substrate, etc., thereby causing inconveniences during storing and transporting a mask blank, or during manufacturing the mask blank and a mask. Thin films 2 and 3 formed in a mask thin film forming step of a mask blank manufacturing steps are covered by a dust-free protective film 5 formed of water-soluble material, thereby preventing foreign matters from adhering to the surface of the mask blank itself and preventing the surface of the mask blank from being damaged in the subsequent step, and when the mask blank is used, the dust-free protective film is removed.

A water-absorbing resin composition showing suppressed dusting of an antimicrobial agent and having an antimicrobial activity. A water-absorbing resin composition which contains a water-absorbing resin and an antimicrobial agent comprising an inorganic compound carrying an antimicrobial metal characterized by showing a dusting degree of 100 CPM or less. This water-absorbing resin composition is appropriately usable in sanitary goods such as paper diapers, sanitary pads, incontinence pads, urine-absorbing materials for pet animals, structural materials such as packings, freshness-preserving materials for foods such as drip-absorbers and cooling agents, agricultural/horticultural goods such as water-retention agents for soil and so on.