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868results about How to "Avoid positioning" patented technology

Supporting device, lithographic apparatus, and device manufacturing method employing a supporting device, and a position control system arranged for use in a supporting device

A supporting device for supporting in a lithographic projection apparatus a supported part relative to a supporting part, is presented. The supporting device includes a first part that engages the supporting part of the lithographic projection apparatus; a second part that engages the supported part of the lithographic projection apparatus; a supporting spring system disposed between the first part and the second part; and a position control system configured to control a position of the supported part. The position control system comprises at least one reference object that is movable relative to the supporting part; a reference support device that supports the reference object relative to the first part, wherein the reference object and the reference support device form a reference mass-spring system; at least one position sensor that detects at least one attribute of the position of the second part relative to at least one of the reference objects, the position sensor including a sensor output for outputting a position signal representing at least one of the attributes; and an actuator, communicatively coupled to the position sensor, that is configured to adjust the position of the second part relative to the first part, in response to the position signal.
Owner:ASML NETHERLANDS BV

Light reflection sheet, light source device, and display device

A through hole penetrating in a vertical direction and a slot which is separated from the through hole in the direction along the sheet surface and is long in a separating direction are provided on a light reflection sheet supported on a support body supporting a light source for reflecting light emitted from the light source, and there are provided a first shaft member fitted in the through hole for setting a position of the light reflection sheet with respect to the support body, and a second shaft member fitted in the slot to enable a relative movement in a longitudinal direction of the slot for setting the position of the light reflection sheet with respect to the support body.
Owner:SHARP KK
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