144 results about "Laser displacement meter" patented technology

Semiconductor device inspection apparatus suitable for inspecting narrow-pitched semiconductor devices and an inspection method. The apparatus has a wafer stage, a base table, an X stage, a Y stage, an elevation unit mounted on the Y stage and elevates the wafer stage up and down, a rotary unit which turns the wafer stage, a vibration elimination table which reduces vibration of the base table, a probe card having plural probe needles which electrically contact plural electrodes when the wafer stage moves upward, and a probe card holder where the probe card is to be placed. The heights of needles of the probe card are detected by a laser displacement meter. Images of a wafer and the needles are sensed by a camera. Based on image information, positions of the wafer and probe card are computed and the X stage, Y stage and elevation unit are controlled.

The invention belongs to the technical field of 3D printing, and particularly relates to a high-precision large-format solid projection 3D printing system and a printing method thereof. A light path projected out of a DLP optical projector is reflected and projected through a thin film light splitter to enter a projection lens, the projection lens projects the light path to the interfacial surfaceof a thin film and resin in a resin tank, a laser displacement meter is arranged on one side of the projection lens, an image controller is arranged on one side of the thin film light splitter, a monitoring light path of the image controller coincides with the projection light path reflected through the thin film light splitter, a sample table is located in the resin tank, the thin film is arranged in the resin tank, a mobile control system controls the resin tank, the sample table and the thin film to move, a three-dimensional geometric model is cut into a two-dimensional picture, the picture is read by a printing system in sequence and is projected to the interfacial surface of the thin film and the resin, exposure is carried out to form a curing layer, the sample table descends and isseparated from the thin film, and repeated exposure is carried out in sequence; and high-precision large-format machining capacity is achieved, and he advanced precise cutting-in means is provided forthe micro-machining field.

To process a surface of a substrate by applying a laser beam to the surface, while liquid is being applied to the surface, distance between the surface of the substrate and a reference point on the axis of a laser displacement meter, distance between the surface of the substrate and the lower end an optical unit is adjusted in accordance with distance measured, and a laser beam is then applied to the surface of the substrate.

A lens shape measurement device, includes: a rotation unit that rotates a lens supported by a stage; a laser displacement meter; a first moving unit that moves the laser displacement meter in a X-direction; a second moving unit that moves the lens in a Y-direction; and a drive controller that controls a drive of the rotation unit, the first moving unit, and the second moving unit in a mirror reflection state in which an incidence angle of the laser beams incident on a measurement target from the laser displacement meter, and a reflection angle of the laser beams reflected by the measurement target are equal to each other with a normal line of the lens passing through the measurement target set as a reference, for each of a plurality of measurement targets set on an edge of the lens in a rotating direction of the lens.

In order to provide a surface shape measuring apparatus and a surface shape measuring method capable of detecting a distortion on the curved surface of a work precisely, a laser displacement meter 17 disposed to the outside surface of a door panel 51 of a curved shape at a confronting position, a Z-axis servo motor 24 to move the laser displacement meter 17 along the top-and-bottom direction with respect to the outside surface of the door panel 51, an X-axis servo motor 22 to move the laser displacement meter 17 along the left-and-right direction, and a Y-axis servo motor 26 to move the laser displacement meter 17 along an confronting direction in which the laser displacement meter 17 and the outside surface of the door panel 51 oppose each other, are provided, and a CPU 21 controls the Y-axis servo motor 26 in such a manner that a constant distance is maintained in the confronting direction between the laser displacement meter 17 and the outside surface of the door panel 51.

A large-scale missile hanging-on-the-plane vibration test device is composed of a hanging-on-the-plane simulated boundary structure support member, a hanger switch-over device, air spring support systems, a hanger, a hanging-on-the-plane missile, air compressors, laser displacement meters, pressure controllers, vibration tools, bulbs, vertical vibrating tables, horizontal vibrating table mounting bases, horizontal vibrating tables and test bearing bases. The large-scale missile hanging-on-the-plane vibration test device is characterized in that the hanging-on-the-plane missile is mounted on the hanger; the hanger is mounted on the hanging-on-the-plane simulated boundary structure support member through the hanger switch-over device; the hanging-on-the-plane simulated boundary structure support member is mounted on the air spring support systems and the air spring support systems are installed on the test bearing bases; the vertical vibrating tables and the horizontal vibrating tables are connected to the vibration tools through the bulbs; and the vibration tools are used for fixing the hanging-on-the-plane missile.

Provided is a road surface state estimating system for carrying out measuring along a plurality of measuring lines on a paved road surface, which improves the reliability of texture estimation of the road surface. A road surface state estimating system (1) includes a laser displacement meter (11) for measuring a distance to the road surface, a stepping motor (120A), rails (12A and 12B), a ball screw (121A), and mounting members (13A and 13B) for causing the laser displacement meter (11) to scan along the measuring lines, and a stepping motor (130), a rail (13), a ball screw (131), and a mounting member (11A) for moving the laser displacement meter (11) in a direction orthogonal to the measuring lines, which allows the laser displacement meter (11) to carry out measurement along the plurality of measuring lines while it is translated two-dimensionally. By determining a mean value of a plurality of texture scores such as MPDs calculated from the result of the measurement along the plurality of measuring lines, the reliability of the texture estimation is improved.

The invention discloses a measuring device for early-aged cement-based material thermal expansion coefficient under different environmental conditions and a measuring method, wherein the measuring device includes a seal test box with the heat-insulating and the moisture-holding functions, a sliding trolley, a humidifier, a heater, a light energy source, a test box inside humiture sensor and a test piece inside humiture sensor are arranged in the seal test box; laser displacement meter terminals are arranged at the two ends of the sliding trolley; laser displacement meters matched with the laser displacement meter terminals for use are arranged outside the seal test box; and a humidifier controller used for controlling the humidifier, a heater controller used for controlling the heater, and a light energy source light energy quantity automatic controller used for controlling the light energy source are also arranged outside the seal test box. Through adopting the device, the linear deformation measurement can be performed after the cement-based material has slight plasticity, and the thermal expansion coefficient of the early-aged cement-based material under a certain temperature, relative humidity and sun radiation can be measured.

Precise measurement of the entire surface of a green tire is performed during a building process. A laser displacement gauge is provided integrally on a bonding roller for bonding a ribbon to a building drum of a tire building apparatus, and the profile of a green tire after bonding the ribbon is measured while the ribbon is bonded. At this time, the displacement gauge is enabled to move in an X-Y plane and rotate in the same plane to change the orientation while the ribbon is bonded, so as to enable measurement of the entire surface of the tire. Then, the resulting data with respect to the Y-axis direction is corrected according to the difference in position between the bonding roller and the laser displacement gauge.

The invention discloses a universal surface-shaped material tension, strain and deflection testing device which comprises a pressure loading system, a test sample holding platform, a pre-stress loading system and a testing and data acquisition system, wherein the pressure loading system consists of a counterforce vertical column, a transverse beam, a base, a servo feeding device A and a loading head; the pre-stress loading system comprises a servo feeding device B, a tension sensor and a loading plate; the testing system comprises a pressure sensor, a displacement sensor and a laser displacement meter; the data acquisition system comprises a data acquirer and a computer. A prepared test sample is placed on the test sample holding platform, pre-stress and pressure are respectively exerted to the surface-shaped material test sample through the pre-stress loading system and the pressure loading system, data tested by different sensors are read by the testing and data acquisition system, and the pressure, the displacement and the deflection of the surface-shaped material test sample are calculated. By adopting the testing device, experiment testing on surface-shaped materials of different materials and different constraint conditions can be met.

The invention provides a hydraulic model test water surface profile and flow velocity measuring device and method. The device comprises two fixed guide rails, a movable guide rail which is perpendicular to the fixed guide rails and can move back and forth along the fixed guide rails is arranged on the two fixed guide rails, a movable measuring device is arranged on the movable guide rails, a first movable measuring rod and a second movable measuring rod which can both move up and down are vertically arranged on the outer side of the movable measuring device, the bottom of the first movable measuring rod is provided with a light touch switch, and an outward extending probe of a laser distance meter is fixed to a thin-walled sleeve outside the first movable measuring rod; the bottom of the second movable measuring rod is provided with a propeller flow velocity meter, and the top of the movable measuring device is provided with an outward extending probe of a laser displacement meter; and the laser distance meter, the laser displacement meter, the propeller flow velocity meter, a driving device and the light touch switch are connected with a single chip microcomputer in the movable measuring device, the single chip microcomputer is in communication with a remote controller through a signal receiver, and display output of measured data is conducted by the single chip microcomputer and a signal receiving displayer through wireless transmission equipment.

A pressure sensor comprises a thin disk-shaped diaphragm, a laser displacement meter for detecting an amount of deformation of the diaphragm, and an operation part connected to the laser displacement meter. In the pressure sensor, an amount of deformation of the diaphragm due to pressure of fluid flowing into the pressure sensor is detected by the laser displacement meter, and pressure of the fluid is obtained on the basis of the amount of deformation and conversion information stored in the operation part in advance. The base part of the diaphragm of the pressure sensor is made of graphite (or silicon substrate), and a thin film of silicon carbide which is in contact with fluid is formed on a surface of the base part. This improves chemical resistance to the pressure sensor and extends the lifetime of the pressure sensor while preventing metal elution.

The invention relates to a micro-pressure detection device, belongs to the detection field, and provides a movable container type high-precision micro-pressure detection device. The movable container type high-precision micro-pressure detection device is characterized in that the movable container type high-precision micro-pressure detection device comprises a fixed container and a movable container, the fixed container and the movable container are communicated through a soft pipe, the movable container is arranged on a lifting platform, the lifting platform is arranged on a lifting guide rail and is driven by a lifting screw to descend or ascend on the lifting guide rail, the lifting screw is driven by a stepping motor, a grating ruler is arranged beside the lifting platform, laser displacement meters used for metering liquid level heights are arranged on the top of the movable container and the top of the fixed container, the fixed container or the movable container is provided with a pressure connector, the stepping motor, the grating ruler and the laser displacement meters are in electric connection with a controller, and the controller comprises a pressure measurement module and a pressure control module. The grating ruler and the laser displacement meters send measured data to the pressure measurement module for micro-pressure measurement and computation, and the pressure control module is connected with the stepping motor and the pressure connector to control the pressure to be stable and starting and stopping of the stepping motor.

In order to adjust the volume of the combustion chamber with high accuracy, a cylinder head 200 includes a recess 204 constituting part of the combustion chamber of the engine and a mating surface for a cylinder block. The recess 204 includes a plurality of openings to which a plurality of specific members are attached respectively. The mating surface 202 is formed to have a cutting stock with respect to three-dimensional shape data of the cylinder head 200 designed to have a target combustion chamber volume. The adjusting method further comprises measuring the surface shape of the recess and the shape of the mating surface around the recess by successively changing the irradiation position of a laser beam using a line laser displacement meter. The adjusting method further comprises removing data of regions equivalent to the plurality of openings from measurement data by comparing the measurement data obtained by the line laser displacement meter with the three-dimensional shape data. The adjusting method still further comprises: calculating the volume of the recess 204 based on the measurement data from which the regions equivalent to the plurality of openings are removed; and deciding the cutting amount of the mating surface 202 by comparing the calculated volume of the recess 204 with a volume of the recess 204 based on the three-dimensional shape data.

The invention relates to a measuring system for self-constriction of early-age concrete. The measuring system comprises a concrete test piece, an intelligent curing box and a computer with control software, wherein the concrete test piece is externally provided with the intelligent curing box which is used for controlling the concrete test piece to be in a temperature constant state; the two sides of the intelligent curing box are provided with laser displacement meters and brackets of the displacement meters; and a base is arranged at the bottom of the intelligent curing box. The measuring system has the beneficial effects that the volume change and deformation of the early-age concrete can be measured effectively, and in particular can realize the accurate measurement on self-constriction deformation beginning from the finishing moment of casting; as the concrete test piece is in the preset temperature constant state all the time, the influence of the temperature change of the concrete to the self-constriction is eliminated, and the temperature deformation of the concrete does not need to be reduced; the laser displacement meters are used for measuring the self-constriction deformation, the accuracy is high, and the influence of environments is low; both the hardware setting and the measurement process monitoring can be realized by the computer and the software, so that the errors of manual operation and recording can be effectively reduced, and the degree of automation of the whole system can be improved; and in addition, consumable materials in the whole system are few, and most of parts can be used repeatedly.

The invention discloses a camera full-light-path image motion measurement system for an optical remote sensing satellite. The system comprises laser displacement meters, a two-way inertia jitter sensor, a reflecting mirror, a laser position sensor and a data acquisition and analysis system, wherein the two-way inertia jitter sensor is fixed on a main mirror of a camera, the laser position sensor is fixed at a focal plane receiver, the two-way inertia jitter sensor converts vibration gesture change of the main mirror of the camera into a measurable laser signal, the laser signal is reflected bythe reflecting mirror, and a camera imaging full light path is received and simulated by the laser position sensor; two laser displacement meters are used for measuring the displacement change of themain mirror of the camera in a horizontal plane in two different directions, and the laser signals received by the laser position sensor are all transmitted to the data acquisition and analysis system for analysis and calculation, so that a camera full-light-path image motion vector is obtained. The influence of mutual coupling of vibration gestures of optical elements in light paths in the camera can be overcome, and the image motion vector under camera jittering and micro-vibration joint action is obtained accurately.

The invention provides a processing method for glass substrates and a device therefor, wherein the chamfer processing of the glass substrate is performed without the positioning thereof to improve the production efficiency of the glass substrate.When a glass substrate (G) is placed on a workbench (12), the glass substrate (G) is absorbed to be fixed to the workbench (12) by the attracting action of the workbench (12) instead of being positioned.Then the position information of the end faces (G1, G2, G3) of the glass substrate (G) is obtained by a laser displacement meter (14-22).The processing start position and the processing end position is calculated by a CPU (28) in consideration of the position information and the desired grinding allowance.Motion mechanisms (34, 40) are controlled by a motion controller (32) based on the position information of the calculated processing start position and the end position, so that the chamfer grinding wheels (24,26) are in a linear movement from the processing start position to the processing end position.

A non-contact and optical measuring automation system, configured to electrically connect to a computer to measure the profile accuracy of a disk cam, includes a base, a rotating chuck, a moving stage module and a laser displacement meter. The rotating chuck is disposed for clamping the disk cam. The moving stage module includes a first linear motion stage movable relative to the base in a first direction and a second linear motion stage movable relative to the first linear motion stage in a second direction. The computer is able to control the rotation of the rotating chuck and the movement of the moving stage module, and is able to control a beam emitted from the laser displacement meter projecting onto a profile surface of the disk cam so as to obtain a profile deviation value of the disk cam by using the laser triangulation method.

The invention relates to a testing device and method of a foundation pit excavation rock soil centrifuge. The device comprises a mold box (16), an enclosure wall body (1), a positioning unit, supporting units and a testing unit, wherein the inner space of the mold box (16) is divided into an experiment region and a water level control box through a baffle (13); a counterforce bracket (7) is arranged at the upper end of the mold box (16); the enclosure wall body (1) is internally provided with a separation wall body (2) according to the requirements, and the inner space of the enclosure wall body (1) is separated into a plurality of excavation regions; the positioning unit is used for hanging the enclosure wall body (1) on the counterforce bracket (7); the supporting units are detachably mounted in the excavation regions layer by layer and abut against inner walls of the excavation regions; the testing unit comprises a pore pressure meter, a soil pressure meter, a strain gauge and a laser displacement meter. Compared with the prior art, the testing device is applicable to more complicated foundation pit centrifugal model tests; meanwhile, the testing device is convenient to mount and detach, and can be repeatedly and circularly utilized; the utilization rate of materials is improved, and components and parts are convenient to replace.

The invention relates to a testing device and method for analyzing the influence of ground subsidence on pipe-soil interaction. The testing device comprises a model box, a soil body, a pipeline, a ground subsidence analog device and a pipe-soil measuring device, wherein the ground subsidence analog device comprises water bags, a water pipe, a concentrator, a water main, a switch, an adjusting valve, a flowmeter, a water collector and a deformation compatibility plate; the pipe-soil measuring device comprises a distributed sensing optical fiber, an OBR backlight reflectometer, a thin film pressure sensor, a data acquisition instrument, a pipeline subsidence mark, a laser displacement meter, a soil body subsidence mark, a high resolution digital camera and a computer; the water bag array isarranged according to the subsidence type; the pipeline is fixed at a preset depth; all the measuring instruments are connected to the computer, and data are acquired by software; the soil body prepared in advance is filled in the model casing; and water is drained from the water bags, the acquisition is stopped until the deformation of the pipeline and the soil body is basically stable, and the data are stored.

The invention relates to a P-Y curve measuring device in the pile-soil interaction shaking table test. The P-Y curve measuring device comprises a bearing pile body embedded into a test soil body in a model box. The model box is arranged on a shaking table. All test sections of the bearing pile body are connected with plain round steel bars perpendicular to the axis of the bearing pile body. Soil pressure meters are arranged on the connecting portions of the bearing pile body and the plain round steel bars. The other ends of the plain round steel bars penetrate through the side walls of the model box and then are connected with glass pieces with the smooth surfaces in a perpendicular mode. Acceleration meters are arranged in the test soil body beside the bearing pile body in a corresponding mode, arranged on the same height position as the plain round steel bars and used for measuring the accelerated speed of the test soil body. A fixing support parallel to the bearing pile body is arranged beside the model box and provided with a plurality of laser displacement meters, wherein emergence laser of the laser displacement meters is perpendicular to the corresponding glass pieces to measure the displacement of the bearing pile body.

The invention relates to a method for measuring the parallelism of guide rails of a ship lift. Two laser displacement gauges are fixed at positions corresponding to the rail surfaces on both sides of each guide rail on a ship-carrying box, and an electric measurement method is used to measure the distance between the laser displacement gauges and the rail surface. Using the principle that the distance between the rail surfaces on both sides of the guide rail and the sum of the measured distances of the two laser displacement meters is fixed, the data of the two laser displacement meters can be obtained through the whole process of running up and down the cabin, and the distance between the rail surfaces on both sides of the guide rail can be obtained. The distance change, that is, the parallelism of the guide rails. Using this measurement method, the parallelism of the whole guide rail can be accurately obtained, which provides a scientific basis for the evaluation and processing of guide rail installation accuracy.

The invention discloses an inflatable seismic mitigation and absorption tunnel lining structure and a construction method, and belongs to the technical field of tunnel engineering earthquake proofing.The structure comprises combined glass fiber reinforced plastic lining segments, segment connectors, large-deformation waterstops, a displacement monitoring device and an intelligent hydraulic inflating device. Each combined glass fiber reinforced plastic lining segment consists of two arc-shaped glass fiber reinforced plastic plates at an inner layer and an outer layer, damping rods and inflatable air bags, wherein the arc-shaped glass fiber reinforced plastic plates at the inner layer and the outer layer are connected through the damping rods, and the inflatable air bags are clamped betweenthe two rows of damping rods in the circumferential direction to form the combined glass fiber reinforced plastic lining segment. The large-deformation waterstops are bonded to the inner sides and the outer sides of connecting seams of the outer layer arc-shaped glass fiber reinforced plastic plates. The displacement monitoring device consists of a laser displacement meter and a communication line for a computer. The intelligent hydraulic inflating device consists of a hydraulic air pump, an intelligent switch and an inflating air pipe. According to the inflatable seismic mitigation and absorption tunnel lining structure and the construction method, the inflatable seismic mitigation and absorption lining segments capable of being spliced are used for replacing a traditional concrete lining, the buffering and seismic absorbing performance of the air bags and the damping rods is utilized, the good dispersion effect on the seismic load is achieved, and the earthquake proofing grade of atunnel is improved.

A method of numerical-control scraping of a work piece has a preparing step, a scanning step, a flatness-parameter inputting step, a surface-finishing step, a related-parameter inputting step, an auto-scraping step and an analyzing step. The preparing step comprises preparing a multi-axis machine tool, a laser displacement meter, an auto scraping apparatus and a computer. The scanning step comprises scanning the work piece. The flatness-parameter inputting step comprises inputting a flatness-parameter. The surface-finishing step comprises calculating out the to-be-scraped ranges of the work piece and scraping the work piece. The related-parameter inputting step comprises inputting desired PPI and POP in the computer, calculating out the HOP, the DOS and the oil content to obtain the length, the width and the depth of a single scraping process. The auto-scraping step comprises scraping the work piece to meet the requirement. The analyzing step comprises detecting the 3D-appearance drawing of the work piece.

The invention discloses a high-speed resin coating 3D printing system. The high-speed resin coating 3D printing system comprises an exposure optical system, a thin film, a laser displacement meter, ahobbing cutter, a bubble scraping knife, a resin tank and a sample table. The sample table is connected with a lifting device, the sample table is located in the resin tank, the thin film covers resinin the resin tank, the resin tank is mounted on a three-dimensional motion control shaft, the exposure optical system is located above the resin tank, a projection lens of the exposure optical systemfaces the thin film, the projection lens is sleeved with an electromagnetic coil, one side of the projection lens is provided with the laser displacement meter, the hobbing cutter is arranged above the thin film, and the bubble scraping knife is arranged below the thin film. High-speed large-width machining capacity is provided, a magnetic field is introduced for controlling the magnetization direction of magnetic resin in the printing process, the 3D printing speed based on resin at present is improved, and high viscosity and high content solid-liquid mixed resin is allowed to be used.

The invention relates to a system for testing an inherent frequency of vibration of a supermicro device and a testing method thereof. The testing system comprises a signal generator, a power amplifier, an exciter, a laser displacement meter group and a digital oscilloscope that are connected successively. The laser displacement meter group is formed by two laser probes connected in parallel; and a sampling frequency is adjusted in advance to be above four times of the highest value of a vibration frequency range of a to-be-measured supermicro device. In addition, the invention also provides a testing method of the system. Therefore, the inherent frequency of partial micro vibration of a millimeter-order micro device or equipment can be detected; and the monitored vibration displacement is allowed to be as low as dozens of micron dimensions.

A coating unit applies, in a state of having a first coating-film of active material already formed, a coating liquid of active material onto a second main face of a base material. The coating unit is provided mainly with a nozzle, a position detection unit, and a drive unit. The nozzle is arranged at a position opposed to a backup roller. The position detection unit is a sensor composed of a so called two-dimensional laser displacement meter. The position detection unit is arranged at a detection position at the upstream side of a discharging position of the nozzle, on a conveying path of the base material along the longitudinal direction thereof. The drive unit adjusts the position of a discharging port with respect to the backup roller, by moving the nozzle in the front-rear, left-right, and up-down directions.

The invention discloses derailment detection devices based on bearing saddles positioning and a detection method thereof. The derailment detection devices are installed on side faces, facing wheels, on the bearing saddles and comprise four supporting frames and four laser displacement meters and processor systems respectively installed on the supporting frames. In addition, the invention also provides the detection method. The derailment detection devices and detection method disclosed by the invention realize an early-warning function before derailment of railway vehicles, solve the problem that the derailment of the railway vehicles cannot be predicted, and provide guarantee for ensuring railway transportation safety and reducing freight vehicle derailment accidents.