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System for testing inherent frequency of vibration of supermicro device and testing method thereof

A natural frequency, testing system technology, applied in instruments, measuring devices, measuring ultrasonic/sonic/infrasonic waves, etc., can solve the change of the natural frequency of ultra-fine structures, the difficulty of post-processing, and the difficulty of small local vibration structures of small devices or equipment. implementation issues

Active Publication Date: 2017-06-20
XI AN JIAOTONG UNIV
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AI Technical Summary

Problems solved by technology

The contact measurement method that directly measures the vibration of the object by using strain gauges and other methods will bring additional mass and change the natural frequency of the ultra-small structure.
However, the non-contact optical image testing method using high-speed cameras is limited by the difficulty of imaging and post-processing of ultra-small vibrations of ultra-small devices.
Conventional vibration testing methods for larger-scale structures are difficult to implement for tiny local vibration structures on tiny devices or equipment

Method used

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  • System for testing inherent frequency of vibration of supermicro device and testing method thereof
  • System for testing inherent frequency of vibration of supermicro device and testing method thereof
  • System for testing inherent frequency of vibration of supermicro device and testing method thereof

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Embodiment Construction

[0014] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0015] Such as figure 1 and figure 2 As shown, a kind of vibration natural frequency test system of ultramicro devices of the present invention comprises a signal generator, a power amplifier, an exciter, a laser displacement meter group and a digital oscilloscope connected in sequence, and the laser displacement meter group consists of two laser probes connected in parallel That is, the first laser probe 4, the second laser probe 5 and the laser probe base 6 that fixes the first laser probe 4 and the second laser probe 5 are composed. According to the sampling theorem, adjust the first laser probe 4 and the second laser probe 5. The sampling frequency is more than four times the maximum value of the measured vibration frequency range, which can realize the measurement of the natural frequency of vibration of tiny devices or equipme...

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Abstract

The invention relates to a system for testing an inherent frequency of vibration of a supermicro device and a testing method thereof. The testing system comprises a signal generator, a power amplifier, an exciter, a laser displacement meter group and a digital oscilloscope that are connected successively. The laser displacement meter group is formed by two laser probes connected in parallel; and a sampling frequency is adjusted in advance to be above four times of the highest value of a vibration frequency range of a to-be-measured supermicro device. In addition, the invention also provides a testing method of the system. Therefore, the inherent frequency of partial micro vibration of a millimeter-order micro device or equipment can be detected; and the monitored vibration displacement is allowed to be as low as dozens of micron dimensions.

Description

technical field [0001] The invention belongs to the technical field of vibration detection, and in particular relates to a natural frequency test system and a test method in a micro-vibration environment of an ultra-small device. Background technique [0002] The overall or local structural vibration generated during the operation of mechanical equipment may cause fatigue or even rapid damage to the mechanical structure. In some special fields, such as satellites, aerospace / aircraft, the adverse effects of structural vibration of precision instruments may be particularly obvious. At present, the natural frequency detection methods of structural vibration include hammering method, resonance method and so on. The contact measurement method of directly measuring the vibration of an object by using strain gauges and other methods will bring additional mass and change the natural frequency of the ultra-small structure. However, the non-contact optical image testing method using...

Claims

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Application Information

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IPC IPC(8): G01H9/00
CPCG01H9/00
Inventor 陈刚曹亮邵兆申张保
Owner XI AN JIAOTONG UNIV
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