613 results about "Ceramic heater" patented technology

In a ceramic heater having a plate-like body made of a ceramic, heating element in one main face of the plate like body, and an electric supply portion to be electrically connected with the heating element, it has been a problem that the temperature is uneven if bent portions are formed in heat generating patterns. The ceramic heater simultaneously satisfying the following: 0.15<=S<=0.85, 0.3<=P<=6.71XS<2>+1.52, and 0.3<=G<=6.71x(1-S)<2>+1.55, in which the reference character S1 denotes the surface area of the heating element in optional 10 mm square region of the effective heat generation area having the heating element therein; the surface ratio S denotes S=S1 / 100 mm<2>, the reference character P denotes the width of the heating element: and the reference character G denotes the gap between the heating element.

A ceramic heater for a semiconductor producing / examining device including a ceramic substrate having a heating surface for receiving a semiconductor wafer, a heating device for generating heat sufficient for producing / examining the semiconductor wafer and formed on the heating surface or inside the ceramic substrate, and a temperature measuring device for measuring a temperature of the heating surface and pressed against the ceramic substrate.

A ceramic heater of the invention includes a ceramic structure; a heat-generating resistor embedded in the ceramic structure; and a feeder line embedded in the ceramic structure so as to be connected, at one end thereof, to the heat-generating resistor. The feeder line is made of metal, and metal grains of a center region of the feeder line are greater in grain size than metal grains of an outer periphery region of the feeder line. Even if a crack developed in the outer periphery region of the feeder line propagates through grain boundaries in the outer periphery region and comes near the center region, propagation of the crack through the interior of the center region can be suppressed.

An electric heating cartridge for dry herb vaporizers has a heating assembly, a battery connector, and a connector insert enclosed by a cartridge sleeve. The battery connector provides a means for attaching the electric heating cartridge to a power source, while a mouthpiece is attached via the connector insert. The heating assembly includes a heating element, a heating chamber, a lower heat insulator, and an upper heat insulator. The heating element is positioned within the heating chamber and powered through the battery connector, wherein herbs are heated within the heating chamber. The heating chamber is positioned in between the lower heat insulator and the upper heat insulator, wherein the lower heat insulator and the upper heat insulator dissipate heat from the heating chamber and the heating element. Ideally, the heating element has a ceramic heater body with at least one heating coil embedded in the heater body.

A nozzle needle has a hollow tubular form having a closed base end. A heat transfer tube is press fitted into a first magnetic portion. The heat transfer tube surrounds an outer peripheral surface of the nozzle needle. A ceramic heater is formed as an integral cylindrical body by sintering a ceramic material together with a heat generating resistive element. A case covers the heater and protects the heater from externally applied water. An inner tube of the case is resiliently engaged with both the heater and the first magnetic portion. Heat of the heater is conducted to the nozzle needle through the inner tube, the first magnetic portion and the heat transfer tube to heat fuel inside the nozzle needle.

The present invention provides a ceramic heater having better anti thermal shock property. A ceramic substrate 12 is formed by providing heat generation bodies 14a and 14b on the surface of a green sheet made from a slurry containing powdered ceramics, sandwiching the green sheet with other green sheets from both upper and lower sides and then laminating and pressing the compiled green sheets. At least some of the heat generation bodies 14a and 14b are disposed on a level P1b offset from a level P1a of other heat generation bodies in the direction of thickness of the ceramic substrate 12.

A ceramic heater for a semiconductor substrate process includes a plate and a shaft. The plate includes a first base and a second base bonded to the first base. Defined on a mounting surface of the first base are: a first region having a surface contacting with a mounted substrate; a purge groove provided in the portion covered with the substrate and surrounds the first region; and a second region having a surface surrounding the purge groove. The first base has: an adsorber configured to adsorb the mounted substrate onto the surface of the first region; and multiple purge holes each penetrating from the bottom surface of the purge groove to the lower surface of the first base. The purge groove is supplied with a purge gas through the multiple purge holes. The surface of the second region is located lower than that of the first region.

The invention is a ceramic heater provided with a resistor heating body formed in an interior of a ceramic substrate, characterized in that the resistor heating body is made of an electrically conductive ceramic and a sintering aid containing layer is existent at least on the surface of the resistor heating body. This heater does not generate crack even in the rapid temperature rise, and has an effect of uniformizing the heating and rapidly increasing the temperature rising rate, and is used in an industrial field of semiconductor production-inspection apparatuses including an electrostatic chuck or plasma generating device, optical apparatuses and the like.

A cordless hair dryer device comprising an ergonomically shaped handle, air cone, rechargeable lithium-type battery pack that releasably attaches to a battery mount on the back of the hair dryer, temperature controls, blower speed controls, DC motor, heater and battery pack charger. The handle is ergonomically designed for balance and comprises the heat and blower controls for convenient access and use. The heater comprises a tourmaline impregnated ceramic heater. Intake air flows over the tourmaline / ceramic heater producing negative ions so the hair does not become statically charged during the drying process. The air intake at the back of the hair dryer includes a removable filter to catch errant fibers and hair before they flow into the blower / heater area. The motor and tourmaline impregnated ceramic heater are mounted close to the battery pack in a manner that provides easier control.

A ceramic substrate for semiconductor manufacture and / or inspection which is conducive to decrease in α-rays radiated, to prevent electrical errors, and to decrease an electrostatic chucking force such as heater or wafer prober, generation of particles, and circuit defects. The ceramic substrate is configured such that the level of α-rays radiated from the surface of the ceramic substrate is not higher than 0.250 c / cm2·hr.

The invention discloses a thermal sensitive camera heater. The thermal sensitive camera heater comprises a heating portion, a connection wire harness and a mounting frame, the heating portion is formed by a heating body and a radiator, the heating body comprises a heat conducting tube and a heating core, the heating core comprises a heating slice, an electrode slice and insulation paper, and the connection wire harness comprises a connection slice. Not fewer than two semi-circular grooves are formed in the outer lateral side of the heat conducting tube. A heat conducting face of the heat conducting tube is 0-15mm wider than the radiator. The thermal sensitive camera heater has the advantages that by the aid of the connection slice added on the electrode slice, reliable connection point contact and stable connection between the heater and the wire harness and convenience in manufacturing are achieved; by the aid of the heat conducting tube and the radiator which are different in width, the radiator can be combined with the heat conducting tube more stably and more uniform in radiation; by the aid of the semi-circular grooves in the lateral side of the heat conducting tube, the inner wall of the heat conducting tube causes less damage to a heating core insulation film, combination of the heating core in the heat conducting tube is tighter, and safety and heat efficiency are improved greatly.

In a ceramic heater a heating element is embedded in a basal ceramic body which is prepared with silicon nitride as a main constituent. MoSi2 particles are dispersed throughout the basal ceramic body. The MoSi2 particles have a granular diameter ranging from 0.1 mu m up to but not including 3.0 mu m. The MoSi2 particles range from 1.0% to 5.0% by weight.

A thermal conduction roller (10) has a tubular roller core (11) with an inside surface; and an electrical insulator coat (16) primarily of zirconia on the inside surface, a heater coat (18) of titania or a titania blend is disposed over the insulator coat (16), and at least two electrical contact assemblies that are disposed inside the roller and electrically connect to the heater coat (18) as the roller (10) is being rotated. One embodiment utilizes an electrical insulator coat (16) in a range of thickness from about ten mils to about twenty mils. A thinner coat may not have sufficient dielectric strength, while a thicker coat decreases thermal conduction. A release material (12) is applied to the outside of the roller (10). Various contact structures according to the present invention are also described in detail, including one especially adapted to connect to a three-phase power supply.

A ceramic heater element and a glow plug incorporating the novel heater element. The heater element has a base portion and a heater portion. Conductive, insulative and resistive layers extend through both the base and heater portions. An outer conductive layer is applied to the outside of the base portion to provide a highly conductive return path. This lends to limit the heating of the resistive layer in the base portion and results in better and more reliable heat concentration in the heater portion. The heater element is further provided with a waterproof non-electrically conductive outer layer. The heater element can be assembled to form a glow plug for a diesel engine.

A semiconductor heating apparatus, in which, when measuring the electrical properties of multiple chips formed on a large size wafer, only one or a several chips are heated uniformly, and the other chips are on standby at a low temperature. The semiconductor heating apparatus includes a heating part for mounting and heating the workpiece, a support part which supports the heating part, and a cooling module which contacts the support part. A plurality of heating parts and supporting parts are joined together. The workpiece mounting surfaces of the plurality of heating parts are preferably constructed in the same plane. In addition, there is preferably a thermal insulating material distributed underneath the support part. The heating part is preferably a ceramic heater.

Disclosed is a ceramic heater capable of preventing failures due to the thermal stress, such as cracks, and corrosion by a calcium component. The ceramic heater has a heating element including at least one substance selected from silicides, nitrides and carbides of molybdenum and silicides, nitrides and carbides of tungsten as a main component, and a base mainly containing silicon nitride in which the heating element is embedded, wherein the base includes: a rare earth element component in an amount from 4 to 25% by mass in terms of an oxide thereof; a silicide of chromium in an amount from 1 to 8% by mass in terms of chromium silicide; and an aluminum component in an amount from 0.02 to 1.0% by mass in terms of aluminum nitride.