The invention relates to a parallel micro-positioning platform based on the driving of piezoelectric
ceramic drivers and a
system, which comprises a micropositioner, a baseplate and a
control system, wherein the micropositioner comprises a movable platform and four flexible hinges, a single piezoelectric
ceramic driver and a pair of side-by-side piezoelectric
ceramic drivers are respectively arranged at the two adjacent sides of the movable platform, one end of each piezoelectric ceramic driver and the movable platform are connected through a universal hinge, the other end of each piezoelectric ceramic driver is connected with a pre-tightening spring through the other universal hinge, and the pre-tightening spring is pre-tightened through a bolt; a
capacitance sensor is respectively arranged on the upper surface of the movable platform along the axis direction of each piezoelectric ceramic driver; and one
capacitance sensor is positioned on a sensor bracket fixed at the outer side of the micropositioner, the other
capacitance sensor is positioned on the other sensor bracket fixed on the upper surface of the movable platform, and computer closed-
loop control is adopted. Through theparallel micro-positioning platform and
system, the displacement straightness accuracy and the positioning precision are effectively improved,
coupling is eliminated, driver separation is avoided, and piezoelectric drivers are protected. By adopting an LQG (
Linear Quadratic Gaussian)
algorithm of an augmented
noise model,
narrowband foundation disturbance is effectively inhibited, and the positioning precision is improved.