The invention discloses a six-dimensional sensor calibration device which comprises a
machine frame, a load mechanism, a positioning mechanism and an
electrical control system. The
electrical control system comprises a human-computer interface, an industrial
personal computer, a multi-axis controller, a
servo controller A, a
servo controller B, a
servo controller C, a servo controller D and a servo controller E, wherein the human-computer interface and the industrial
personal computer serve as an upper computer used for monitoring displacement, angle and force signals. A
closed loop force
feedback control system is adopted, accurate and automatic loading of calibration force is achieved, and a six-dimensional sensor can be continuously loaded. A
grating ruler is installed on a high-precision cross sliding table mechanism to form full closed-loop
displacement control, the displacement in the X (Y) direction is precisely positioned, and turning and rotating angles of the six-dimensional sensor can be precisely positioned through a circular
grating, and therefore the precise positioning of straight line displacement and a rotating angle of the six-dimensional sensor is achieved. According to the six-dimensional sensor calibration device, loading of any six-dimensional force / torque within a measuring range can be achieved, the loading process is simple and operation is convenient.