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83results about How to "Smooth and precise control" patented technology

Exposure apparatus and device manufacturing method

An exposure apparatus includes a projection optical system for projecting a pattern on a reticle onto a substrate, the projection optical system including an optical element closest to the substrate, an illumination optical system for illuminating the reticle using light from a light source, and a temperature controller for controlling a temperature of the optical element and thereby a temperature of a fluid that is filled in a space between the optical element in the projection optical system and the substrate, the exposure apparatus exposing the substrate via said projection optical system and the fluid.
Owner:CANON KK

Driving mechanism

A driving mechanism comprises: (i) an actuator comprising: an electro-mechanical conversion element; a driving member which is connected to one end of the electro-mechanical conversion element and moves according to elongation or contraction of the electro-mechanical conversion element; and a weight member provided on the other end of the electro-mechanical conversion element; (ii) a driven member frictionally engaged with the driving member; and (iii) a driving circuit that drives the actuator, wherein the actuator allows the driven member to move along the driving member, and the driving circuit drives the electro-mechanical conversion element at a driving frequency f which gives f≧21 / 2·f0 when resonance frequency of a 1-freedom system is f0 in which the electro-mechanical conversion element and the driving member are designated as a mass and the weight member is designated as a spring, and driving frequency of the electro-mechanical conversion element is f.
Owner:FUJI PHOTO OPTICAL CO LTD

Multi-variable state closed-loop control for a steam generator of a thermal power plant

ActiveUS20150276209A1Overcome disadvantageReduce computation timeFuel supply regulationSuperheating controlLinear quadratic controllerThermal power station
A device for closed-loop control of a plurality of state variables of a steam generator of a thermal power plant is provided. In order to achieve stable and exact closed-loop control of the plurality of state variables, a multi-variable control / controller controls the plurality of state variables and uses a linear quadratic controller for this multi-variable control / controller.
Owner:SIEMENS ENERGY GLOBAL GMBH & CO KG

Hill-start assist control method for electric automobile

The invention relates to a hill-start assist control method for an electric automobile. The hill-start assist control method for the electric automobile comprises the following steps of detecting theworking state of an automobile during starting; judging the gear and the foot brake state of the automobile; detecting motor feedback speed of the automobile; determining the control process accordingto the motor feedback speed; if the motor feedback speed is negative, recording the actual time needed by the automobile to pass through a system default distance; controlling output command torque according to the actual time and controlling the automobile to start on the basis of the output command torque. According to the hill-start assist control method for the electric automobile, differentoutput torques can be adjusted according to known automobile situations of different loads and different slopes by using the hill-start assist control method for the electric automobile to control theelectric automobile to start; therefore, phenomenons that excessive rushing of the automobile may be caused under situations of small hills and small loads by using only one set of PI parameters andthe slope sliding distance is increased due to insufficient force under situations of big hills and large loads to cause dangers for following automobiles if only one set of PI parameters are adoptedare improved; and the safety of the automobile is improved.
Owner:SHANGHAI JINMAI ELECTRONICS TECH

Extra-high-voltage cooling shielding clothes for live working

The invention provides extra-high-voltage cooling shielding clothes for live working. The shielding clothes comprise a shielding clothes body, cooling assemblies arranged on the shielding clothes body, and a detecting unit. The shielding clothes body comprises a conduction outer lining, a cooling inner lining, and a ventilating layer sandwiched between the conduction outer lining and the cooling inner lining. The number of the cooling assemblies is at least four. Each cooling assembly comprises one air guide opening and a minitype fan connected with the air guide opening, and the air guide openings are formed in the same position on the shielding clothes body. The shielding clothes are convenient to assemble and disassemble without damaging the whole shielding efficiency of the shielding clothes; while the electric integrity of the shielding clothes is ensured, air volume is conveyed uniformly, and effective cooling is ensured; meanwhile, mobility of airflow is improved, the coverage area is increased, and the temperature of the human body under the high-temperature condition is reduced effectively by means of evaporation of sweat; the situation that due to the unsmooth airflow, the clothes are fluffy and swell, and inconvenience is brought to operation of an operator is avoided, and the safety of equipment and the personal safety of the operator are ensured.
Owner:CHINA ELECTRIC POWER RES INST +2
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