The invention relates to a method for calibrating a three-dimensional micro-touch
force sensor, which comprises the following steps: adopting the bending deformation principle of a
cantilever beam to acquire a micro-force
signal required by calibrating the three-dimensional micro-touch
force sensor; measuring the elastic coefficient of the
cantilever beam; based on the
cantilever beam of the known elastic coefficient, establishing a calibrating
system of the three-dimensional micro-touch
force sensor, and measuring input-output property coefficients of the calibrating
system by applying acting force of different intensity to the sensor; measuring the measuring bar displacement property of the three-dimensional micro-touch force sensor; according to the measured elastic coefficient of the cantilever beam, the input-output property coefficients of the calibrating
system and the measuring bar displacement property coefficient of the sensor, establishing a
mathematical model to acquire the input-output property coefficients of the sensor; and according to a zero output
voltage value of the sensor and the input-output property coefficients of the sensor, establishing an input-output property equation of the sensor so as to finish the calibration of the three-dimensional micro-touch force sensor. The method can realize the calibration of the output property of the three-dimensional micro-touch force sensor, and has the advantages of high and reliable precision and good
repeatability.