Method for calibrating three-dimensional micro-touch force sensor
A technology of force sensor and calibration method, applied in the direction of instrument, force/torque/work measuring instrument calibration/test, measurement device, etc. Improve accuracy, reduce calibration error, and reduce the effect of step size
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[0035] The calibration method of the three-dimensional micro-tactile force sensor of the present invention will be described in detail below in conjunction with the accompanying drawings of the embodiments.
[0036] The calibration method of the three-dimensional micro-tactile force sensor of the present invention comprises the following steps:
[0037] (1) Using the principle of cantilever beam bending deformation to obtain the small force signal required for the calibration of the three-dimensional micro-tactile force sensor;
[0038] (2) Measure the elastic coefficient of the cantilever beam;
[0039] The measurement of the elastic coefficient of the cantilever beam is realized by making the free end of the cantilever beam deflect through the micro-movement platform, and then measuring the magnitude of the force applied to the balance by the free end of the cantilever beam. Specifically, build as figure 2 In the cantilever beam elastic coefficient calibration system show...
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