The invention discloses a
ridge-shaped substrate integrated
waveguide band-pass filter based on a TSV. The filter comprises a high-resistance
silicon substrate, two rectangular
metal grooves A are formed in the high-resistance
silicon substrate; a plurality of pairs of diaphragms are arranged on the two sides in the
metal groove A; the side walls of the diaphragm and the
metal groove A are formedby arranging
silicon through holes; the top surface insulating layer is arranged at the top of the high-resistance silicon substrate, the rectangular metal groove B is embedded into the top surface insulating layer, the
ridge surface metal layer is arranged in the middle of the bottom of the top surface insulating layer, the adjacent side walls of the two rectangular metal grooves A are connectedthrough the
ridge surface metal layer, and the other two side walls of the two rectangular metal grooves A are connected through the rectangular metal groove B. The manufacturing process of the ridge-shaped substrate integrated
waveguide band-pass filter based on the TSV is compatible with the
CMOS process, and the manufacturing cost is low; the size is small, the filter can be conveniently integrated in a miniaturized
chip, stacked
chip interconnection is realized, the length of an
interconnection line is shortened, and the
chip performance is greatly improved; and the filter is large in bandwidth and can be applied to the
microwave /
radio frequency field.