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Manufacturing method of thermopile sensor

The technology of a thermopile sensor and its manufacturing method is applied in the field of thermopile sensor manufacturing, which can solve the problems such as the need to improve the accuracy of the device, and achieve the effects of miniaturization, avoiding radiation loss, and realizing vertical system integration

Active Publication Date: 2020-12-22
NINGBO SEMICON INT CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004]However, the device accuracy of existing thermopile sensors needs to be improved

Method used

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  • Manufacturing method of thermopile sensor
  • Manufacturing method of thermopile sensor
  • Manufacturing method of thermopile sensor

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Embodiment Construction

[0019] It can be known from the background art that the device precision of the existing thermopile sensor needs to be improved.

[0020] The inventor analyzes and believes that thermopile sensors are also called thermopile infrared detectors. Traditional thermopile sensors make thermocouple pairs by depositing polysilicon / metal on dielectric films to sense temperature information, and then pass silicon anisotropic moisture on the back The manufacturing method of corrosion method forms a thermal insulation cavity under the dielectric film to increase thermal resistance, and electrically connects the thermocouple pair to the circuit structure formed on the side of the thermocouple pair, so as to realize the transmission of induction signals. However, there is no substrate structure under the device formed by this method, and the heat in the heat-insulating cavity will still be lost in a certain form, so that the measurement accuracy of the thermopile sensor is not high.

[0021...

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Abstract

The embodiment of the invention provides a manufacturing method of a thermopile sensor, and the method comprises the steps: providing a thermopile structure plate which comprises a thermal radiation induction region, and forming a thermopile structure in the thermal radiation induction region; providing a circuit substrate, forming a heat radiation reflecting plate on the circuit substrate, forming a first groove in the supporting layer covering the circuit substrate, and enabling the heat radiation reflecting plate to be located below the first groove; and bonding the supporting layer with the thermopile structure plate, so that the first groove is clamped between the thermopile structure plate and the circuit substrate to form a first cavity, and locating the thermal radiation reflectingplate below the thermopile structure. The thermopile sensor obtained by adopting the manufacturing method of the thermopile sensor provided by the embodiment of the invention can avoid the loss of infrared radiation and improve the measurement precision.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a method for manufacturing a thermopile sensor. Background technique [0002] A thermopile sensor (English name: transducer / sensor) is a detection device that detects information by transforming the sensed information into corresponding signal outputs according to certain rules. Typical thermopile sensors, such as temperature thermopile sensors, pressure thermopile sensors, optical thermopile sensors, etc., not only promote the transformation and upgrading of traditional industries, but also continue to develop new industries, becoming the focus of attention. [0003] With the rapid development of microelectromechanical systems (MEMS) technology, miniaturized thermopile sensors based on MEMS micromachining technology are widely used in temperature measurement, gas sensing, optical imaging, etc. due to their small size and low price. field. [0004] However, the device...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L35/34B81C1/00G01J5/12H10N10/01
CPCB81C1/00238B81C1/00047B81C1/0069B81C1/00301G01J5/12G01J2005/123H10N10/01
Inventor 黄河
Owner NINGBO SEMICON INT CORP
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